Summary Abstract: Broad‐beam electron source

Harold R. Kaufman; Raymond S. Robinson

doi:10.1116/1.573842

Summary Abstract: Broad‐beam electron source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.573842 ◽

1986 ◽

Vol 4 (3) ◽

pp. 608-609 ◽

Cited By ~ 1

Author(s):

Harold R. Kaufman ◽

Raymond S. Robinson

Keyword(s):

Electron Source ◽

Beam Electron ◽

Broad Beam

Download Full-text

Broad‐beam electron source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.573377 ◽

1985 ◽

Vol 3 (4) ◽

pp. 1774-1778 ◽

Cited By ~ 7

Author(s):

Harold R. Kaufman ◽

Raymond S. Robinson

Keyword(s):

Electron Source ◽

Beam Electron ◽

Broad Beam

Download Full-text

6155. Broad-beam electron source

Vacuum ◽

10.1016/0042-207x(86)90422-7 ◽

1986 ◽

Vol 36 (10) ◽

pp. 731

Keyword(s):

Electron Source ◽

Beam Electron ◽

Broad Beam

Download Full-text

Etch characterization of a broad‐beam electron cyclotron resonance ion source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576610 ◽

1990 ◽

Vol 8 (3) ◽

pp. 2945-2949 ◽

Cited By ~ 1

Author(s):

E. Ghanbari ◽

T. Nguyen ◽

S. Bui ◽

E. Ostan

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Beam Electron ◽

Broad Beam

Download Full-text

A broad‐beam electron cyclotron resonance ion source for sputtering etching and deposition of material

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.575821 ◽

1989 ◽

Vol 7 (3) ◽

pp. 918-924 ◽

Cited By ~ 14

Author(s):

E. Ghanbari ◽

I. Trigor ◽

T. Nguyen

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Beam Electron ◽

Broad Beam

Download Full-text

Broad beam electron sources with plasma cathodes

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment ◽

10.1016/0168-9002(92)90049-a ◽

1992 ◽

Vol 321 (3) ◽

pp. 417-428 ◽

Cited By ~ 30

Author(s):

N.N. Koval ◽

E.M. Oks ◽

P.M. Schanin ◽

Yu.E. Kreindel ◽

N.V. Gavrilov

Keyword(s):

Beam Electron ◽

Electron Sources ◽

Broad Beam

Download Full-text

7532. Etch characterization of a broad-beam electron cyclotron resonance ion source

Vacuum ◽

10.1016/0042-207x(91)91600-s ◽

1991 ◽

Vol 42 (10-11) ◽

pp. 678

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Beam Electron ◽

Broad Beam

Download Full-text

Low-energy broad beam electron gun

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580948 ◽

1997 ◽

Vol 15 (5) ◽

pp. 2740-2742 ◽

Cited By ~ 7

Author(s):

Thomas W. Barefoot ◽

Hans D. Ebinger ◽

John T. Yates

Keyword(s):

Low Energy ◽

Electron Gun ◽

Beam Electron ◽

Broad Beam

Download Full-text

Experimental study of the beam divergence from a broad‐beam electron cyclotron resonance ion source

Review of Scientific Instruments ◽

10.1063/1.1141325 ◽

1990 ◽

Vol 61 (1) ◽

pp. 291-293 ◽

Cited By ~ 1

Author(s):

E. Ghanbari ◽

T. Nguyen ◽

R. Lindstrom

Keyword(s):

Experimental Study ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Beam Divergence ◽

Beam Electron ◽

Broad Beam

Download Full-text

A low emittance, flat-beam electron source for linear colliders

Physical Review Special Topics - Accelerators and Beams ◽

10.1103/physrevstab.4.053501 ◽

2001 ◽

Vol 4 (5) ◽

Cited By ~ 66

Author(s):

R. Brinkmann ◽

Y. Derbenev ◽

K. Flöttmann

Keyword(s):

Electron Source ◽

Beam Electron ◽

Linear Colliders ◽

Flat Beam ◽

Low Emittance

Download Full-text

Plasma Cathode for a Broad-Beam Electron Accelerator

Technical Physics Letters ◽

10.1134/1.1877622 ◽

2005 ◽

Vol 31 (2) ◽

pp. 122 ◽

Cited By ~ 4

Author(s):

N. V. Gavrilov

Keyword(s):

Electron Accelerator ◽

Plasma Cathode ◽

Beam Electron ◽

Broad Beam

Download Full-text