Mechanisms of Al film growth by ultraviolet laser photolysis of trimethylaluminum

1986 ◽  
Vol 4 (6) ◽  
pp. 3146-3152 ◽  
Author(s):  
T. Motooka ◽  
S. Gorbatkin ◽  
D. Lubben ◽  
Djula Eres ◽  
J. E. Greene
Keyword(s):  
Film Growth ◽  
Laser Photolysis ◽  
Ultraviolet Laser

SiO2 film growth by ArF laser photolysis of SiH4/N2O mixtures

1991 ◽  
Vol 51 (3-4) ◽  
pp. 171-176 ◽  
Author(s):  
Masaharu Tsuji ◽  
Minoru Sakumoto ◽  
Naoki Itoh ◽  
Hiroshi Obase ◽  
Yukio Nishimura
Keyword(s):  
Film Growth ◽  
Sio2 Film ◽  
Laser Photolysis ◽  
Arf Laser

Ultraviolet laser photolysis: Primary photochemistry of Fe(CO)5 in PF3

1981 ◽  
Vol 74 (1) ◽  
pp. 361-369 ◽  
Author(s):  
Gilbert Nathanson ◽  
Barbara Gitlin ◽  
Alan M. Rosan ◽  
James T. Yardley
Keyword(s):  
Laser Photolysis ◽  
Ultraviolet Laser ◽  
Primary Photochemistry

Ultraviolet‐laser photolysis of disilane

1989 ◽  
Vol 66 (2) ◽  
pp. 910-914 ◽  
Author(s):  
Y. Muranaka ◽  
T. Motooka ◽  
D. Lubben ◽  
J. E. Greene
Keyword(s):  
Laser Photolysis ◽  
Ultraviolet Laser
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