Monte Carlo calculation for structural modifications in ion‐assisted thin film deposition due to thermal spikes

Karl‐Heinz Müller

doi:10.1116/1.573468

Monte Carlo calculation for structural modifications in ion‐assisted thin film deposition due to thermal spikes

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.573468 ◽

1986 ◽

Vol 4 (2) ◽

pp. 184-188 ◽

Cited By ~ 103

Author(s):

Karl‐Heinz Müller

Keyword(s):

Thin Film ◽

Monte Carlo ◽

Monte Carlo Calculation ◽

Thin Film Deposition ◽

Film Deposition ◽

Structural Modifications

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Summary Abstract: Monte Carlo calculation for ion‐assisted thin film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.573906 ◽

1986 ◽

Vol 4 (3) ◽

pp. 461-462 ◽

Cited By ~ 20

Author(s):

Karl‐Heinz Müller

Keyword(s):

Thin Film ◽

Monte Carlo ◽

Monte Carlo Calculation ◽

Thin Film Deposition ◽

Film Deposition

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Monte Carlo simulation and experimental study of an electron cyclotron resonance plasma for thin film deposition

IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1997.604953 ◽

2002 ◽

Author(s):

E. Koretzky ◽

S.P. Kuo ◽

S.C. Kuo

Keyword(s):

Thin Film ◽

Experimental Study ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Thin Film Deposition ◽

Electron Cyclotron ◽

Film Deposition ◽

Resonance Plasma

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How to Use the Monte Carlo Simulation Technique? Application: A Study of the Gas Phase during Thin Film Deposition

Theory, Application, and Implementation of Monte Carlo Method in Science and Technology ◽

10.5772/intechopen.88559 ◽

2019 ◽

Author(s):

Fethi Khelfaoui ◽

Oumelkheir Babahani

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Gas Phase ◽

Thin Film Deposition ◽

Film Deposition ◽

Simulation Technique ◽

Monte Carlo Simulation Technique

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Monte Carlo simulation of thin‐film deposition in a rectangular groove

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576339 ◽

1989 ◽

Vol 7 (6) ◽

pp. 3217-3221 ◽

Cited By ~ 39

Author(s):

M. J. Cooke ◽

G. Harris

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Thin Film Deposition ◽

Film Deposition ◽

Rectangular Groove

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Lattice Monte Carlo models of thin film deposition

Thin Solid Films ◽

10.1016/s0040-6090(99)01057-3 ◽

2000 ◽

Vol 365 (2) ◽

pp. 189-200 ◽

Cited By ~ 97

Author(s):

George H. Gilmer ◽

Hanchen Huang ◽

Tomas Diaz de la Rubia ◽

Jacques Dalla Torre ◽

Frieder Baumann

Keyword(s):

Thin Film ◽

Monte Carlo ◽

Thin Film Deposition ◽

Film Deposition ◽

Lattice Monte Carlo

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A kinetic Monte Carlo simulation of fiber texture formation during thin-film deposition

Journal of Applied Physics ◽

10.1063/1.363863 ◽

1997 ◽

Vol 81 (3) ◽

pp. 1196-1203 ◽

Cited By ~ 19

Author(s):

Richard W. Smith

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Kinetic Monte Carlo ◽

Thin Film Deposition ◽

Fiber Texture ◽

Film Deposition ◽

Texture Formation ◽

Kinetic Monte Carlo Simulation

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Thin film deposition by pulsed laser ablation: the direct simulation Monte Carlo

10.1117/12.334405 ◽

1998 ◽

Author(s):

Nickolay Y. Bykov ◽

German A. Lukianov

Keyword(s):

Thin Film ◽

Monte Carlo ◽

Laser Ablation ◽

Pulsed Laser ◽

Direct Simulation Monte Carlo ◽

Pulsed Laser Ablation ◽

Thin Film Deposition ◽

Film Deposition ◽

Direct Simulation ◽

Simulation Monte Carlo

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Kinetic Monte Carlo simulation of self-organized pattern formation in thin film deposition

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(02)01865-7 ◽

2003 ◽

Vol 202 ◽

pp. 249-254 ◽

Cited By ~ 15

Author(s):

F. Elsholz ◽

M. Meixner ◽

E. Schöll

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Pattern Formation ◽

Kinetic Monte Carlo ◽

Thin Film Deposition ◽

Film Deposition ◽

Kinetic Monte Carlo Simulation ◽

Self Organized

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Monte-Carlo simulation of laser ablated plasma for thin film deposition

Applied Surface Science ◽

10.1016/s0169-4332(01)00176-3 ◽

2001 ◽

Vol 177 (1-2) ◽

pp. 15-21 ◽

Cited By ~ 20

Author(s):

Sushmita R Franklin ◽

R.K Thareja

Keyword(s):

Thin Film ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Thin Film Deposition ◽

Film Deposition

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Monte Carlo Methods for Simulating Thin Film Deposition

Handbook of Materials Modeling ◽

10.1007/1-4020-3286-2_123 ◽

2005 ◽

pp. 2363-2377

Author(s):

Corbett Battaile

Keyword(s):

Thin Film ◽

Monte Carlo ◽

Monte Carlo Methods ◽

Thin Film Deposition ◽

Film Deposition

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