Secondary ion mass spectrometry/digital imaging for the three‐dimensional chemical characterization of solid state devices

S. R. Bryan; W. S. Woodward; R. W. Linton; D. P. Griffis

doi:10.1116/1.573263

Secondary ion mass spectrometry/digital imaging for the three‐dimensional chemical characterization of solid state devices

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.573263 ◽

1985 ◽

Vol 3 (6) ◽

pp. 2102-2107 ◽

Cited By ~ 16

Author(s):

S. R. Bryan ◽

W. S. Woodward ◽

R. W. Linton ◽

D. P. Griffis

Keyword(s):

Mass Spectrometry ◽

Solid State ◽

Digital Imaging ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Chemical Characterization ◽

Solid State Devices ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Chemical characterization of industrial steel and aluminium sheet surfaces by secondary ion mass spectrometry, glow discharge optical spectroscopy and other surface-sensitive techniques

Materials Science and Engineering ◽

10.1016/0025-5416(80)90040-3 ◽

1980 ◽

Vol 42 ◽

pp. 309-320 ◽

Cited By ~ 28

Author(s):

E. Janssen

Keyword(s):

Mass Spectrometry ◽

Glow Discharge ◽

Optical Spectroscopy ◽

Secondary Ion Mass Spectrometry ◽

Chemical Characterization ◽

Aluminium Sheet ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Visualization and Chemical Characterization of the Cathode Electrolyte Interphase Using He-Ion Microscopy and In Situ Time-of-Flight Secondary Ion Mass Spectrometry

ACS Applied Energy Materials ◽

10.1021/acsaem.0c01333 ◽

2020 ◽

Vol 3 (9) ◽

pp. 8822-8832

Author(s):

Laura Wheatcroft ◽

Nico Klingner ◽

René Heller ◽

Gregor Hlawacek ◽

Doğan Özkaya ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Chemical Characterization ◽

Ion Mass Spectrometry ◽

Ion Microscopy ◽

Secondary Ion

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Three‐dimensional characterization of conducting polymer arrays using secondary ion mass spectrometry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577958 ◽

1992 ◽

Vol 10 (4) ◽

pp. 2679-2684 ◽

Cited By ~ 5

Author(s):

K. H. Gray ◽

S. Gould ◽

R. M. Leasure ◽

I. H. Musselman ◽

J. J. Lee ◽

...

Keyword(s):

Mass Spectrometry ◽

Conducting Polymer ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Time-of-flight secondary-ion mass spectrometry for the surface characterization of solid-state pharmaceuticals

Journal of Pharmacy and Pharmacology ◽

10.1211/jpp.59.2.0011 ◽

2007 ◽

Vol 59 (2) ◽

pp. 251-259 ◽

Cited By ~ 15

Author(s):

Clive A. Prestidge ◽

Timothy J. Barnes ◽

William Skinner

Keyword(s):

Mass Spectrometry ◽

Solid State ◽

Surface Characterization ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Secondary Ion Mass Spectrometry (SIMS) for Chemical Characterization of Metal Halide Perovskites

Advanced Functional Materials ◽

10.1002/adfm.202002201 ◽

2020 ◽

Vol 30 (35) ◽

pp. 2002201 ◽

Cited By ~ 7

Author(s):

Yongtao Liu ◽

Matthias Lorenz ◽

Anton V. Ievlev ◽

Olga S. Ovchinnikova

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Chemical Characterization ◽

Metal Halide ◽

Ion Mass Spectrometry ◽

Halide Perovskites ◽

Secondary Ion

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Three-Dimensional Characterization of LiNbO3 Waveguides By Secondary Ion Mass Spectrometry (SIMS) Image Depth Profiling

10.1117/12.963930 ◽

1990 ◽

Cited By ~ 1

Author(s):

Steven W. Novak ◽

Hilda Kanber ◽

Stephan Bar ◽

Champa Sridhar ◽

Robert Wilson

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Depth Profiling ◽

Ion Mass Spectrometry ◽

Secondary Ion ◽

Image Depth

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Detection of Au+ Ions During Fluorine Gas-Assisted Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) for the Complete Elemental Characterization of Microbatteries

ACS Applied Materials & Interfaces ◽

10.1021/acsami.1c10352 ◽

2021 ◽

Vol 13 (34) ◽

pp. 41262-41274

Author(s):

Agnieszka Priebe ◽

Jordi Sastre ◽

Moritz H. Futscher ◽

Jakub Jurczyk ◽

Marcos V. Puydinger dos Santos ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Tof Sims ◽

Ion Mass Spectrometry ◽

Secondary Ion ◽

Elemental Characterization

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Robust automated three-dimensional segmentation of secondary ion mass spectrometry image sets

Fresenius Journal of Analytical Chemistry ◽

10.1007/s002160051446 ◽

1999 ◽

Vol 365 (1-3) ◽

pp. 63-69 ◽

Cited By ~ 2

Author(s):

M. Wolkenstein ◽

T. Stubbings ◽

H. Hutter

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Mass Spectrometry Image ◽

Ion Mass Spectrometry ◽

Three Dimensional Segmentation ◽

Secondary Ion

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Forensic Characterization of Lipsticks Using Time-of-Flight Secondary Ion Mass Spectrometry

Journal of Analytical Chemistry ◽

10.1134/s1061934821070091 ◽

2021 ◽

Vol 76 (7) ◽

pp. 854-867

Author(s):

Jihye Lee ◽

Yeonhee Lee

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Secondary ion mass spectrometry (SIMS) applications on characterization of RF NPN bipolar polysilicon emitter process

10.1063/1.52570 ◽

1997 ◽

Cited By ~ 2

Author(s):

S. Lu

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Polysilicon Emitter ◽

Secondary Ion

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