Summary Abstract: Plasma potentials of 13.56 MHz rf argon glow discharges in a planar system

1985 ◽  
Vol 3 (3) ◽  
pp. 638-639 ◽  
Author(s):  
K. Köhler ◽  
J. W. Coburn ◽  
D. E. Horne ◽  
E. Kay ◽  
J. H. Keller
Keyword(s):  
Planar System ◽  
Glow Discharges

Plasma potentials of 13.56‐MHz rf argon glow discharges in a planar system

1985 ◽  
Vol 57 (1) ◽  
pp. 59-66 ◽  
Author(s):  
K. Köhler ◽  
J. W. Coburn ◽  
D. E. Horne ◽  
E. Kay ◽  
J. H. Keller
Keyword(s):  
Planar System ◽  
Glow Discharges

2-D temperature fields in glow discharges measured with ultraviolet Filtered Rayleigh Scattering

2000 ◽  
Author(s):  
Azer Yalin ◽  
Yuriy Ionikh ◽  
Alexander Meshchanov ◽  
Richard Miles
Keyword(s):  
Rayleigh Scattering ◽  
Temperature Fields ◽  
Glow Discharges

Power dissipation in rf glow discharges

Vacuum ◽  
1991 ◽  
Vol 42 (1-2) ◽  
pp. 33-34 ◽  
Author(s):  
R Deltchev ◽  
M Albert ◽  
G Suchaneck ◽  
K Schade
Keyword(s):  
Power Dissipation ◽  
Glow Discharges

Microdischarge-assisted ignition of dielectric-barrier high-pressure glow discharges

2006 ◽  
Vol 88 (2) ◽  
pp. 021502 ◽  
Author(s):  
Jichul Shin ◽  
Laxminarayan L. Raja
Keyword(s):  
High Pressure ◽  
Dielectric Barrier ◽  
Glow Discharges
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