Frequency dependence of ion bombardment of grounded surfaces in rf argon glow discharges in a planar system
2001 ◽
Vol 137
(1)
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pp. 104-110
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Keyword(s):
1985 ◽
Vol 3
(3)
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pp. 638-639
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1997 ◽
Vol 241-243
(1)
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pp. 1248-1252