A novel method for the determination of the energies of impurity ions bombarding a solid surface exposed to a low pressure plasma
1984 ◽
Vol 2
(1)
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pp. 35-39
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Keyword(s):
Keyword(s):
Keyword(s):
2009 ◽
Vol 24
(1)
◽
pp. 117-121
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Keyword(s):
Keyword(s):