Dependence of F atom density on pressure and flow rate in CF4 glow discharges as determined by emission spectroscopy

1981 ◽  
Vol 18 (2) ◽  
pp. 353-356 ◽  
Author(s):  
J. W. Coburn ◽  
M. Chen
Keyword(s):  
Flow Rate ◽  
Emission Spectroscopy ◽  
Atom Density ◽  
Glow Discharges

scholarly journals Optical Diagnostics for a High.Power, RF-Inductively Coupled Plasma

1988 ◽  
Vol 117 ◽  
Author(s):  
N. S. Nogar ◽  
G. L. Keaton ◽  
J. E. Anderson ◽  
M. Trkula
Keyword(s):  
Flow Rate ◽  
Inductively Coupled Plasma ◽  
Emission Spectroscopy ◽  
Local Thermodynamic Equilibrium ◽  
Laser Induced Fluorescence ◽  
Rf Power ◽  
Inductively Coupled ◽  
Spatially Resolved ◽  
Hull Design ◽  
Ar Gas

AbstractEmission spectroscopy and laser-induced fluorescence have been used to monitor the field and tail-flame regions of a Hull-design 1 inductively coupled plasma. This plasma is used for a variety of syntheses 2,3 including SiC, TiC, BN, AlN and diamond. Temporallyand spatially-resolved spectra of both pure Ar and Ar/gas mixtures have been studied as a function of RF power, pressure and flow rate. Preliminary data suggest that the system is far from local thermodynamic equilibrium.

Optical emission spectroscopy of rf glow discharges of methane–silane mixtures

1998 ◽  
Vol 317 (1-2) ◽  
pp. 120-123 ◽  
Author(s):  
J.L Andújar ◽  
E Pascual ◽  
G Viera ◽  
E Bertran
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Glow Discharges

Study of the structure in rf glow discharges in SiH4/H2by spatiotemporal optical emission spectroscopy: Influence of negative ions

1990 ◽  
Vol 68 (11) ◽  
pp. 5532-5539 ◽  
Author(s):  
Fumiyoshi Tochikubo ◽  
Akira Suzuki ◽  
Shigeru Kakuta ◽  
Yuko Terazono ◽  
Toshiaki Makabe
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Negative Ions ◽  
Optical Emission ◽  
Glow Discharges

Metastable atom density in helium, neon, and argon glow discharges

1982 ◽  
Vol 53 (12) ◽  
pp. 8532-8536 ◽  
Author(s):  
K. A. Hardy ◽  
J. W. Sheldon
Keyword(s):  
Metastable Atom ◽  
Atom Density ◽  
Glow Discharges ◽  
Helium Neon

Selective Grafting of Amine Groups on Polyethylene by Means of Modulated RF NH3 Plasmas

1998 ◽  
Vol 544 ◽  
Author(s):  
M. Creatore ◽  
G. Cicala ◽  
P. Favia ◽  
R. Lamendola ◽  
R. d'Agostno
Keyword(s):  
Electron Spectroscopy ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Surface Composition ◽  
Optical Emission ◽  
Active Species ◽  
Time Resolved ◽  
Glow Discharges ◽  
Before And After ◽  
Amine Groups

AbstractPlasma treatments in power modulated NH3 RF glow discharges have been performed for modifying the surface of polyethylene (PE). Time Resolved Optical Emission Spectroscopy (TR-OES) has been utilized for monitoring the emission of active species during the modulation period of the discharge, Electron Spectroscopy for Chemical Analysis (ESCA) has been used for studying the surface composition of PE before and after the derivatization of plasmagrafted -NH2 groups. We present our preliminary results here, which show how modulated NH3 plasmas can effectively improve the grafting selectivity of -NH2 respect to all other N-containing groups.

Atomic Emission of Chlorine: Spectra from 200 to 900 nm by Sealed Inductively Coupled Plasma-Atomic Emission Spectroscopy

1994 ◽  
Vol 48 (3) ◽  
pp. 382-386 ◽  
Author(s):  
Tracey Jacksier ◽  
Ramon M. Barnes
Keyword(s):  
Flow Rate ◽  
Atmospheric Pressure ◽  
Inductively Coupled Plasma ◽  
Emission Spectroscopy ◽  
Atomic Emission ◽  
Molecular Spectra ◽  
Plasma Atomic Emission ◽  
Inductively Coupled ◽  
Spectral Evaluation ◽  
Atomic Chlorine

Eighty-seven atomic chlorine lines and chlorine molecular spectra emitted in the 200–900 nm wavelength range are identified in a pure chlorine discharge generated at atmospheric pressure in a sealed inductively coupled plasma. Only small quantities of chlorine are needed for spectral evaluation because the flow rate is typically less than 20 mL/min.

Sign in / Sign up

Export Citation Format

Share Document