Secondary ion mass spectrometry and Rutherford backscattering spectroscopy for the analysis of thin films

1981 ◽  
Vol 18 (2) ◽  
pp. 282-288 ◽  
Author(s):  
W. Reuter ◽  
J. E. E. Baglin
Keyword(s):  
Mass Spectrometry ◽  
Thin Films ◽  
Secondary Ion Mass Spectrometry ◽  
Rutherford Backscattering ◽  
Rutherford Backscattering Spectroscopy ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

An investigation of cobalt oxide based nanocrystalline thin films by secondary ion mass spectrometry

2001 ◽  
Vol 15 (17) ◽  
pp. 1621-1624 ◽  
Author(s):  
Simona Barison ◽  
Davide Barreca ◽  
Sergio Daolio ◽  
Monica Fabrizio ◽  
Eugenio Tondello
Keyword(s):  
Mass Spectrometry ◽  
Thin Films ◽  
Cobalt Oxide ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Nanocrystalline Thin Films
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