Abstract: Chemical state effects in Auger electron spectroscopy

1978 ◽  
Vol 15 (2) ◽  
pp. 651-651
Author(s):  
T. E. Madey ◽  
P. H. Holloway ◽  
R. R. Rye ◽  
J. E. Houston
1993 ◽  
Vol 105 (1) ◽  
pp. 36-43 ◽  
Author(s):  
Shigeru Tanaka ◽  
Chiyoshi Akita ◽  
Naoki Ohashi ◽  
Jun Kawai ◽  
Hajime Haneda ◽  
...  

1993 ◽  
Vol 318 ◽  
Author(s):  
J. S. Solomon ◽  
L. Petry ◽  
S. R. Smith

ABSTRACTThe chemical state of (NH4)2S treated (100)GaAs surfaces exposed to ambient conditions for several days was correlated with barrier height measurements. Surface chemistry was characterized by Auger electron spectroscopy and barrier heights were calculated from C-V measurements obtained with a Hg probe. Results show that surfaces are chemically and electrically unstable for several hours following the sulfide treatment. The chemical and electrical states continually changed during ambient exposure up to 300 hours. Although strictly speaking, the surfaces were not passivated, the presence of sulfur did inhibit the formation of Ga and As oxides and the incorporation of carbon. In addition, stable, low barrier heights were observed after ambient exposure for several hours. Barrier heights from C-V measurements using deposited Au and Al contacts were compared to the barrier heights obtained with a Hg probe.


1978 ◽  
Vol 69 (4) ◽  
pp. 1504-1512 ◽  
Author(s):  
R. R. Rye ◽  
T. E. Madey ◽  
J. E. Houston ◽  
P. H. Holloway

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