Thickness determination of ultrathin films by Auger electron spectroscopy

P. H. Holloway

doi:10.1116/1.568553

Thickness determination of ultrathin films by Auger electron spectroscopy

Journal of Vacuum Science and Technology ◽

10.1116/1.568553 ◽

1975 ◽

Vol 12 (6) ◽

pp. 1418-1422 ◽

Cited By ~ 45

Author(s):

P. H. Holloway

Keyword(s):

Auger Electron Spectroscopy ◽

Ultrathin Films ◽

Electron Spectroscopy ◽

Auger Electron ◽

Thickness Determination

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Thickness determination of ultrathin films by auger electron spectroscopy.

Vacuum ◽

10.1016/s0042-207x(76)80109-1 ◽

1976 ◽

Vol 26 (4-5) ◽

pp. 220

Keyword(s):

Auger Electron Spectroscopy ◽

Ultrathin Films ◽

Electron Spectroscopy ◽

Auger Electron ◽

Thickness Determination

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Thickness determination of thin oxide layers at the bottom of contact holes of semiconductor devices by Auger electron spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578907 ◽

1994 ◽

Vol 12 (1) ◽

pp. 12-18 ◽

Cited By ~ 4

Author(s):

W. Pamler ◽

J. Mathuni

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Semiconductor Devices ◽

Oxide Layers ◽

Thickness Determination ◽

Thin Oxide

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Determination of growth modes of ultrathin films from Auger electron spectroscopy : An assessment and commentary

Thin Solid Films ◽

10.1016/0040-6090(81)90444-2 ◽

1981 ◽

Vol 82 (2) ◽

pp. 201-211 ◽

Cited By ~ 98

Author(s):

G.E. Rhead ◽

M.-G. Barthès ◽

C. Argile

Keyword(s):

Auger Electron Spectroscopy ◽

Ultrathin Films ◽

Electron Spectroscopy ◽

Auger Electron ◽

Growth Modes

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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution, analysis area, and sample area viewed by the analyser

10.3403/30124424 ◽

2005 ◽

Keyword(s):

Chemical Analysis ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Chemical ◽

X Ray ◽

Resolution Analysis ◽

Surface Chemical Analysis

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Determination of the depth resolution of Auger electron spectroscopy depth profiles of anodic barrier oxide films on differently pretreated aluminium substrates

Surface and Interface Analysis ◽

10.1002/sia.740220139 ◽

1994 ◽

Vol 22 (1-12) ◽

pp. 175-180 ◽

Cited By ~ 8

Author(s):

J. De Laet ◽

K. De Boeck ◽

H. Terryn ◽

J. Vereecken

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Oxide Films ◽

Depth Resolution ◽

Depth Profiles ◽

Auger Electron Spectroscopy Depth

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Determination of the Low Temperature Diffusion of Chromium Through Gold Films by Ion Scattering Spectroscopy and Auger Electron Spectroscopy

Surface Analysis Techniques for Metallurgical Applications ◽

10.1520/stp39062s ◽

2009 ◽

pp. 68-68-11 ◽

Cited By ~ 8

Author(s):

GC Nelson ◽

PH Holloway

Keyword(s):

Low Temperature ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Gold Films ◽

Ion Scattering ◽

Temperature Diffusion ◽

Ion Scattering Spectroscopy

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Determination of the grain boundary diffusion coefficient from Ag surface coverage in thin Au-Ag film by auger electron spectroscopy

Applied Physics A Solids and Surface ◽

10.1007/bf00616918 ◽

1984 ◽

Vol 34 (3) ◽

pp. 193-194 ◽

Cited By ~ 11

Author(s):

A. Bukaluk ◽

M. Rozwadowski ◽

R. Siuda

Keyword(s):

Diffusion Coefficient ◽

Grain Boundary ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Coverage ◽

Boundary Diffusion ◽

Boundary Diffusion Coefficient ◽

Ag Film

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Quantitative determination of atomic concentrations by Auger electron spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.575487 ◽

1988 ◽

Vol 6 (6) ◽

pp. 3130-3133 ◽

Cited By ~ 6

Author(s):

Y. Goldstein ◽

A. Many ◽

O. Millo ◽

S. Z. Weisz ◽

O. Resto

Keyword(s):

Quantitative Determination ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron

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Determination of the Grain Boundary Diffusion Coefficients in Thin Film Au-Ag Couples by Auger Electron Spectroscopy

Physics of Solid Surfaces 1984 - Studies in Surface Science and Catalysis ◽

10.1016/s0167-2991(08)65122-8 ◽

1985 ◽

pp. 170-171 ◽

Cited By ~ 3

Author(s):

Antoni Bukaluk

Keyword(s):

Thin Film ◽

Grain Boundary ◽

Auger Electron Spectroscopy ◽

Diffusion Coefficients ◽

Electron Spectroscopy ◽

Auger Electron ◽

Boundary Diffusion ◽

Grain Boundary Diffusion

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Determination of Film Thickness or Ion Etch Rate Using Auger Electron Spectroscopy

Review of Scientific Instruments ◽

10.1063/1.1685626 ◽

1972 ◽

Vol 43 (2) ◽

pp. 335-337 ◽

Cited By ~ 8

Author(s):

R. N. Yasko ◽

L. J. Fried

Keyword(s):

Film Thickness ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Etch Rate ◽

Auger Electron

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