Epitaxial growth of high-k BaxSr1−xTiO3 thin films on SrTiO3 (001) substrates by atomic layer deposition

2020 ◽  
Vol 38 (3) ◽  
pp. 032401 ◽  
Author(s):  
Thanh Tung Le ◽  
John G. Ekerdt
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Layer Deposition ◽  
High K

Epitaxial growth of barium titanate thin films on germanium via atomic layer deposition

2017 ◽  
Vol 476 ◽  
pp. 6-11 ◽  
Author(s):  
Edward L. Lin ◽  
Agham B. Posadas ◽  
Hsin Wei Wu ◽  
David J. Smith ◽  
Alexander A. Demkov ◽  
...  
Keyword(s):  
Thin Films ◽  
Barium Titanate ◽  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Layer Deposition

Characterization and electrical properties of high-k GdScO3 thin films grown by atomic layer deposition

2007 ◽  
Vol 88 (4) ◽  
pp. 633-637 ◽  
Author(s):  
P. Myllymäki ◽  
M. Roeckerath ◽  
M. Putkonen ◽  
S. Lenk ◽  
J. Schubert ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
High K
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