Thermodynamics and kinetic behaviors of thickness-dependent crystallization in high-k thin films deposited by atomic layer deposition

2015 ◽  
Vol 33 (1) ◽  
pp. 01A140 ◽  
Author(s):  
Xianglong Nie ◽  
Fei Ma ◽  
Dayan Ma ◽  
Kewei Xu
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
High K

Characterization and electrical properties of high-k GdScO3 thin films grown by atomic layer deposition

2007 ◽  
Vol 88 (4) ◽  
pp. 633-637 ◽  
Author(s):  
P. Myllymäki ◽  
M. Roeckerath ◽  
M. Putkonen ◽  
S. Lenk ◽  
J. Schubert ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
High K

Structural and electrical properties of Ge-doped ZrO2 thin films grown by atomic layer deposition for high-k dielectrics

2018 ◽  
Vol 53 (21) ◽  
pp. 15237-15245 ◽  
Author(s):  
Bo-Eun Park ◽  
Yujin Lee ◽  
Il-Kwon Oh ◽  
Wontae Noh ◽  
Satoko Gatineau ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
High K ◽  
Structural And Electrical Properties
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