Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering

Anmar H. Shukor; Haider A. Alhattab; Ichiro Takano

doi:10.1116/1.5131518

Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.5131518 ◽

2020 ◽

Vol 38 (1) ◽

pp. 012803 ◽

Cited By ~ 1

Author(s):

Anmar H. Shukor ◽

Haider A. Alhattab ◽

Ichiro Takano

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Copper Oxide ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Electrical and optical properties of amorphous vanadium oxide thin films deposited by DC magnetron sputtering

10.1117/12.865957 ◽

2010 ◽

Author(s):

Zhenfei Luo ◽

Zhiming Wu ◽

Mingjun Du ◽

Xiangdong Xu ◽

Junsheng Yu ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Vanadium Oxide ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

Vanadium Oxide Thin Films

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Electrical and optical properties of silver doped indium oxide thin films prepared by reactive DC magnetron sputtering

Journal of Physics and Chemistry of Solids ◽

10.1016/j.jpcs.2005.11.014 ◽

2006 ◽

Vol 67 (7) ◽

pp. 1518-1523 ◽

Cited By ~ 13

Author(s):

A. Subrahmanyam ◽

Ullash Kumar Barik

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Indium Oxide ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Electrical and optical properties of tantalum oxide thin films prepared by reactive magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2011.08.019 ◽

2011 ◽

Vol 509 (41) ◽

pp. 9758-9763 ◽

Cited By ~ 12

Author(s):

A.X. Wei ◽

Z.X. Ge ◽

X.H. Zhao ◽

J. Liu ◽

Y. Zhao

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Tantalum Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Electrical and Optical Properties of Fluorine Doped Tin Oxide Thin Films Prepared by Magnetron Sputtering

Coatings ◽

10.3390/coatings4040732 ◽

2014 ◽

Vol 4 (4) ◽

pp. 732-746 ◽

Cited By ~ 112

Author(s):

Ziad Banyamin ◽

Peter Kelly ◽

Glen West ◽

Jeffery Boardman

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Tin Oxide ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Electrical and Optical Properties of Zinc Oxide Thin Films Deposited by Magnetron Sputtering

ECS Transactions ◽

10.1149/1.3567641 ◽

2019 ◽

Vol 34 (1) ◽

pp. 577-582

Author(s):

Xiaoqin Ding ◽

Yunfeng Lai

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Influence of addition of indium and of post-annealing on structural, electrical and optical properties of gallium-doped zinc oxide thin films deposited by direct-current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2015.03.068 ◽

2015 ◽

Vol 583 ◽

pp. 201-204 ◽

Cited By ~ 10

Author(s):

Duy Phong Pham ◽

Huu Truong Nguyen ◽

Bach Thang Phan ◽

Van Dung Hoang ◽

Shinya Maenosono ◽

...

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

Post Annealing ◽

Direct Current Magnetron Sputtering

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Structural, Electrical, and Optical Properties of Bismuth-doped Zinc-oxide Thin Films Grown by Radio-frequency Magnetron Sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.72.943 ◽

2018 ◽

Vol 72 (8) ◽

pp. 943-946

Author(s):

Johngeon Shin ◽

Shinho Cho

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Electrical and Optical Properties of Eu-Doped Indium Oxide Thin Films Deposited by Radio-Frequency Magnetron Sputtering

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2014.10081 ◽

2014 ◽

Vol 14 (12) ◽

pp. 8982-8986 ◽

Cited By ~ 2

Author(s):

Jong-Kwan Woo ◽

Shinho Cho

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Electrical and optical properties of Al doped cadmium oxide thin films deposited by radio frequency magnetron sputtering

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2007.05.025 ◽

2007 ◽

Vol 91 (18) ◽

pp. 1692-1697 ◽

Cited By ~ 129

Author(s):

B. Saha ◽

S. Das ◽

K.K. Chattopadhyay

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Cadmium Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Effect of Oxygen Flow Rate on Structural, Electrical and Optical Properties of Zinc Aluminum Oxide Thin Films Deposited by DC Magnetron Sputtering

Semiconductors ◽

10.1134/s106378261904016x ◽

2019 ◽

Vol 53 (4) ◽

pp. 573-581

Author(s):

B. Rajesh Kumar ◽

B. Hymavathi

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Aluminum Oxide ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Dc Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Zinc Aluminum Oxide ◽

Effect Of Oxygen

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