Mechanism of highly selective SiO2 etching over Si3N4 using a cyclic process with BCl3 and fluorocarbon gas chemistries

2020 ◽  
Vol 38 (2) ◽  
pp. 023004
Author(s):  
Miyako Matsui ◽  
Tatehito Usui ◽  
Kenichi Kuwahara
Keyword(s):  
Author(s):  
Jochen Rau

Thermodynamic processes involve energy exchanges in the forms of work, heat, or particles. Such exchanges might be reversible or irreversible, and they might be controlled by barriers or reservoirs. A cyclic process takes a system through several states and eventually back to its initial state; it may convert heat into work (engine) or vice versa (heat pump). This chapter defines work and heat mathematically and investigates their respective properties, in particular their impact on entropy. It discusses the roles of barriers and reservoirs and introduces cyclic processes. Basic constraints imposed by the laws of thermodynamics are considered, in particular on the efficiency of a heat engine. The chapter also introduces the thermodynamic potentials: free energy, enthalpy, free enthalpy, and grand potential. These are used to describe energy exchanges and equilibrium in the presence of reservoirs. Finally, this chapter considers thermodynamic coefficients which characterize the response of a system to heating, compression, and other external actions.


Materials ◽  
2021 ◽  
Vol 14 (5) ◽  
pp. 1281
Author(s):  
Tanja Pušić ◽  
Bosiljka Šaravanja ◽  
Krešimir Malarić

This paper investigates a textile material of low surface mass for its protection against electromagnetic radiation (EMR), which is suitable for composite structures of garments, and for technical and interior applications. The shielding effectiveness against EMR of fabric knitted from polyamide threads coated with silver, measured in the frequency range of 0.9 GHz to 2.4 GHz, indicated a high degree of protection. The key contribution of the paper is the evaluation of the stability of the shielding properties against EM radiation after applying apolar and polar solvents, in synergy with the cyclic process parameters of wet and dry cleaning. The results of the study confirmed the decline in the shielding effectiveness after successive cycles of material treatment with dry and wet cleaning. The effect of wet cleaning in relation to dry cleaning is more apparent, which is due to the damage of the silver coating on the polyamide threads in the knitted fabric.


1991 ◽  
Vol 113 (2) ◽  
pp. 254-262 ◽  
Author(s):  
Fan Jinghong ◽  
Peng Xianghe

The hardening behavior of materials in nonproportional cyclic process is related to the internal changes of materials, such as dislocation cell for wary slip material and ladder or vein substructures for planar slip material. The multiplicatively separated form of hardening function f, in terms of nonhardening region proposed by Ohno [1], and the measure of nonproportionality A proposed by Banallal and Marquis in 1987 [2], is then explained on this physical foundation. The new contributions of this hardening function are: (a) two parameters (f2 and f3) dependent on A are used to differentiate between the influence of latent hardening realized by a sudden change of loading direction, and hereditary hardening associated with nonproportional loading, (b) a general differential form fi (i = 1,2,3) is proposed, and memorial parameters a1 and a3 are introduced to describe different deformation history effects for wary and planar slip materials, (c) different hardening mechanisms through fi are embedded into thermomechanically constitutive relation. The stress responses of 304 and 316 stainless steels subjected to biaxial nonproportional loadings at room temperature are analyzed and compared with the experimental results obtained by Chaboche [3], Tanaka [4, 5] and Ohno [1].


1983 ◽  
Vol 97 (4) ◽  
pp. 1156-1168 ◽  
Author(s):  
D J McGookey ◽  
R G Anderson

Mouse peritoneal macrophages can be induced to accumulate cholesteryl esters by incubating them in the presence of acetylated low density lipoprotein. The cholesteryl esters are sequestered in neutral lipid droplets that remain in the cell even when the acetylated low density lipoprotein is removed from the culture media. Previous biochemical studies have determined that the cholesterol component of cholesteryl ester droplets constantly turns over with a half time of 24 h by a cyclic process of de-esterification and re-esterification. We have used morphologic techniques to determine the spatial relationship of cholesteryl ester, free cholesterol, and lipase activity during normal turnover and when turnover is disrupted. Lipid droplets were surrounded by numerous 7.5-10.0-nm filaments; moreover, at focal sites on the margin of each droplet there were whorles of concentrically arranged membrane that penetrated the matrix. Histochemically detectable lipase activity was associated with these stacks of membrane. Using filipin as a light and electron microscopic probe for free cholesterol, we determined that a pool of free cholesterol was associated with each lipid droplet. Following incubation in the presence of the exogenous cholesterol acceptor, high density lipoprotein, the cholesteryl ester droplets disappeared and were replaced with lipid droplets of a different lipid composition. Inhibition of cholesterol esterification caused cholesteryl ester droplets to disappear and free cholesterol to accumulate in numerous myelin-like structures in the body of the cell.


RSC Advances ◽  
2016 ◽  
Vol 6 (20) ◽  
pp. 16548-16554 ◽  
Author(s):  
Yan Zhao ◽  
Kaini Tang ◽  
Qinqin Liu ◽  
B. Van der Bruggen ◽  
Arcadio Sotto Díaz ◽  
...  

Recovery of chemically degraded cation exchange membranes in a cyclic process.


2017 ◽  
Vol 128 ◽  
pp. 130-139 ◽  
Author(s):  
Haigang Xiao ◽  
Wei Ye ◽  
Xiaoping Song ◽  
Yanmin Wang ◽  
Yuantai Ma ◽  
...  

1998 ◽  
Vol 16 (2) ◽  
pp. 502-508 ◽  
Author(s):  
Teruo Shibano ◽  
Keisuke Nakamura ◽  
Tatsuo Oomori

Author(s):  
Onome Scott-Emuakpor ◽  
Tommy George ◽  
Charles Cross ◽  
M.-H. Herman Shen

An energy-based method for predicting fatigue life of half-circle notched specimens, based on the nominal applied stress amplitude, has been developed. This developed method is based on the understanding that the total strain energy dissipated during a monotonic fracture and a cyclic process is the same material property, where the density of each can be determined by measuring the area underneath the monotonic true stress-strain curve and measuring the sum of the area within each Hysteresis loop in the cyclic process, respectively. Using this understanding, the criterion for determining fatigue life prediction of half-circle notched components is constructed by incorporating the stress gradient effect through the notch root cross-section. Though fatigue at a notch root is a local phenomenon, evaluation of the stress gradient through the notch root cross-section is essential for incorporating this method into finite element analysis minimum potential energy process. The validation of this method was carried out by comparison with both notched and unnnotched experimental fatigue life of Aluminum 6061-T6 (Al 6061-T6) specimens under tension/compression loading at the theoretical notch fatigue stress concentration factor of 1.75. The comparison initially showed a slight deviation between prediction and experimental results. This led to the analysis of strain energy density per cycle up to failure, and an improved Hysteresis representation for the energy-based prediction analysis. With the newly developed Hysteresis representation, the energy-based prediction comparison shows encouraging agreement with unnotched experimental results and a theoretical notch stress concentration value.


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