Optical and mass spectrometric measurements of dissociation in low frequency, high density, remote source O2/Ar and NF3/Ar plasmas

2020 ◽  
Vol 38 (2) ◽  
pp. 023011 ◽  
Author(s):  
Hanyang Li ◽  
Yingliang Zhou ◽  
Vincent. M. Donnelly
2000 ◽  
Vol 34 (21) ◽  
pp. 4496-4503 ◽  
Author(s):  
Ian W. Croudace ◽  
Phillip E. Warwick ◽  
Rex N. Taylor ◽  
Andrew B. Cundy

1987 ◽  
Vol 92 (A8) ◽  
pp. 8827 ◽  
Author(s):  
D. E. Hunton ◽  
A. A. Viggiano ◽  
W. Swider ◽  
John F. Paulson ◽  
C. Sherman

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