Mass spectrometric measurements of neutral reactant and product densities during Si etching in a high‐density helical resonator Cl2plasma

V. M. Donnelly

doi:10.1063/1.362613

Mass spectrometric measurements of neutral reactant and product densities during Si etching in a high‐density helical resonator Cl2plasma

Journal of Applied Physics ◽

10.1063/1.362613 ◽

1996 ◽

Vol 79 (12) ◽

pp. 9353-9360 ◽

Cited By ~ 51

Author(s):

V. M. Donnelly

Keyword(s):

Mass Spectrometric ◽

High Density ◽

Spectrometric Measurements ◽

Product Densities

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Optical and mass spectrometric measurements of dissociation in low frequency, high density, remote source O2/Ar and NF3/Ar plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5126429 ◽

2020 ◽

Vol 38 (2) ◽

pp. 023011 ◽

Cited By ~ 2

Author(s):

Hanyang Li ◽

Yingliang Zhou ◽

Vincent. M. Donnelly

Keyword(s):

Low Frequency ◽

Mass Spectrometric ◽

High Density ◽

Spectrometric Measurements

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Optical and Mass Spectrometric Measurements of the CH4–CO2 Dry Reforming Process in a Low Pressure, Very High Density, and Purely Inductive Plasma

The Journal of Physical Chemistry A ◽

10.1021/acs.jpca.0c04033 ◽

2020 ◽

Vol 124 (36) ◽

pp. 7271-7282

Author(s):

Hanyang Li ◽

Yingliang Zhou ◽

Vincent M. Donnelly

Keyword(s):

Low Pressure ◽

Dry Reforming ◽

Mass Spectrometric ◽

High Density ◽

Spectrometric Measurements ◽

Very High

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Investigation of an Alleged Nuclear Incident at Greenham Common Airbase Using TI-mass Spectrometric Measurements of Uranium Isotopes

Environmental Science & Technology ◽

10.1021/es000032m ◽

2000 ◽

Vol 34 (21) ◽

pp. 4496-4503 ◽

Cited By ~ 5

Author(s):

Ian W. Croudace ◽

Phillip E. Warwick ◽

Rex N. Taylor ◽

Andrew B. Cundy

Keyword(s):

Mass Spectrometric ◽

Uranium Isotopes ◽

Spectrometric Measurements

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Review of the development in determination of 129I amount and the isotope ratio of 129I/127I using mass spectrometric measurements

Microchemical Journal ◽

10.1016/j.microc.2021.106476 ◽

2021 ◽

pp. 106476

Author(s):

Jihye Kim ◽

Jong-Yun Kim ◽

Sang-Eun Bae ◽

Kyuseok Song ◽

Jong-Ho Park

Keyword(s):

Isotope Ratio ◽

Mass Spectrometric ◽

Spectrometric Measurements

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Sequential enrichment of sulfated glycans by strong anion-exchange chromatography prior to mass spectrometric measurements

Journal of the American Society for Mass Spectrometry ◽

10.1016/j.jasms.2009.09.017 ◽

2010 ◽

Vol 21 (3) ◽

pp. 348-357 ◽

Cited By ~ 14

Author(s):

Ming Lei ◽

Milos V. Novotny ◽

Yehia Mechref

Keyword(s):

Anion Exchange ◽

Anion Exchange Chromatography ◽

Exchange Chromatography ◽

Mass Spectrometric ◽

Strong Anion Exchange ◽

Spectrometric Measurements

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The application of a membrane interface to on-line mass spectrometric measurements of volatile compounds in aqueous solutions

Rapid Communications in Mass Spectrometry ◽

10.1002/rcm.1290030603 ◽

1989 ◽

Vol 3 (6) ◽

pp. 175-177 ◽

Cited By ~ 12

Author(s):

Seksan Dheandhanoo ◽

John Dulak

Keyword(s):

Aqueous Solutions ◽

Volatile Compounds ◽

Mass Spectrometric ◽

Membrane Interface ◽

Line Mass ◽

On Line ◽

Spectrometric Measurements

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Simultaneous atomic emission and mass spectrometric measurements on an inductively coupled plasma

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(91)80093-i ◽

1991 ◽

Vol 46 (6-7) ◽

pp. 967-973 ◽

Cited By ~ 16

Author(s):

K. Lepla ◽

M.A. Vauchan ◽

G. Horlick

Keyword(s):

Inductively Coupled Plasma ◽

Atomic Emission ◽

Mass Spectrometric ◽

Inductively Coupled ◽

Spectrometric Measurements

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Mass spectrometric measurements of SF6chemical releases from sounding rockets

Journal of Geophysical Research Atmospheres ◽

10.1029/ja092ia08p08827 ◽

1987 ◽

Vol 92 (A8) ◽

pp. 8827 ◽

Cited By ~ 13

Author(s):

D. E. Hunton ◽

A. A. Viggiano ◽

W. Swider ◽

John F. Paulson ◽

C. Sherman

Keyword(s):

Mass Spectrometric ◽

Sounding Rockets ◽

Spectrometric Measurements

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Mass spectrometric measurements of steady-state kinetics of cyanobacterial nitrogen fixation by monitoring dissolved N2in an open system

FEMS Microbiology Letters ◽

10.1111/j.1574-6968.1981.tb07607.x ◽

1981 ◽

Vol 12 (1) ◽

pp. 37-40 ◽

Cited By ~ 12

Author(s):

Bent B. Jensen ◽

Raymond P. Cox ◽

Hans Degn

Keyword(s):

Nitrogen Fixation ◽

Steady State ◽

Open System ◽

Mass Spectrometric ◽

Steady State Kinetics ◽

Spectrometric Measurements ◽

Kinetics Of

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Photoionization Mass Spectrometric Measurements of Initial Reaction Pathways in Low-Temperature Oxidation of 2,5-Dimethylhexane

The Journal of Physical Chemistry A ◽

10.1021/jp507811d ◽

2014 ◽

Vol 118 (44) ◽

pp. 10188-10200 ◽

Cited By ~ 11

Author(s):

Brandon Rotavera ◽

Judit Zádor ◽

Oliver Welz ◽

Leonid Sheps ◽

Adam M. Scheer ◽

...

Keyword(s):

Low Temperature ◽

Mass Spectrometric ◽

Reaction Pathways ◽

Initial Reaction ◽

Low Temperature Oxidation ◽

Temperature Oxidation ◽

Spectrometric Measurements

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