scholarly journals Submicrometer ultrananocrystalline diamond films processed in oxygen and hydrogen plasma and analyzed by UV-vis spectroscopy: Thickness and optical constant results

2020 ◽  
Vol 27 (2) ◽  
pp. 026601 ◽  
Author(s):  
Gongxiaohui Chen ◽  
Linda Spentzouris ◽  
Kiran Kumar Kovi ◽  
Sergey V. Baryshev
2021 ◽  
Vol 56 (12) ◽  
pp. 7171-7230
Author(s):  
Orlando Auciello ◽  
Dean M. Aslam

AbstractA comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, and the research and development focused on the integration of the diamond films with other film-based materials. The review includes both theoretical and experimental work focused on optimizing the films synthesis and the resulting properties to achieve the best possible MEMS/NEMS devices performance to produce new generation of MEMS/NEMS external environmental sensors and energy generation devices, human body implantable biosensors and energy generation devices, electron field emission devices and many more MEMS/NEMS devices, to produce transformational positive impact on the way and quality of life of people worldwide.


Author(s):  
Qiang Lin ◽  
Sulin Chen ◽  
Zhe Ji ◽  
Zhewei Huang ◽  
Zhinan Zhang ◽  
...  

2010 ◽  
Vol 204 (12-13) ◽  
pp. 1997-2001 ◽  
Author(s):  
Monika Karásková ◽  
Lenka Zajíčková ◽  
Vilma Buršíková ◽  
Daniel Franta ◽  
David Nečas ◽  
...  

2006 ◽  
Vol 74 (23) ◽  
Author(s):  
I. S. Beloborodov ◽  
P. Zapol ◽  
D. M. Gruen ◽  
L. A. Curtiss

1989 ◽  
Vol 162 ◽  
Author(s):  
Sacharia Albin ◽  
Linwood Watkins

ABSTRACTCurrent-voltage characteristics of type Ia synthetic diamond, type IIb natural diamond and free-standing diamond films were measured before and after hydrogenation. The diamond films were polycrystalline, deposited on sacrificial silicon substrates using a microwave chemical vapor deposition process. On hydrogenation, all the samples showed several orders of magnitude increase in conductivity. Hydrogenation was carried out under controlled conditions to study the changes in the I-V characteristics of the samples. The concentration of electrically active hydrogen was determined from the I-V data. Hydrogen passivation of deep traps in diamond is clearly demonstrated.


Nanoscale ◽  
2019 ◽  
Vol 11 (13) ◽  
pp. 6120-6128 ◽  
Author(s):  
Jae-Eun Kim ◽  
Kalpataru Panda ◽  
Joong Il Jake Choi ◽  
Jeong Young Park

The improved triboelectrical properties after UV exposure on UNCD films were investigated using AFM.


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