Effects of nitrogen-argon flow ratio on the microstructural and mechanical properties of TiAlSiN/CrN multilayer coatings prepared using high power impulse magnetron sputtering

2019 ◽  
Vol 37 (5) ◽  
pp. 051501 ◽  
Author(s):  
Hui Liu ◽  
Jian-Fu Tang ◽  
Xiaojian Wang ◽  
Wei Li ◽  
Chi-Lung Chang
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
High Power ◽  
Multilayer Coatings ◽  
Flow Ratio ◽  
Argon Flow

The Influence of Pulse Width on Microstructure and Mechanical Properties of CrNx Coatings Deposited by HPPMS

2014 ◽  
Vol 633 ◽  
pp. 398-401
Author(s):  
Xiang Min Xu ◽  
Hao Zhang ◽  
Yi Bin Jin ◽  
Hao Chen Zhao ◽  
Shu Wang Duo
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
High Power ◽  
Pulse Width ◽  
Pulse Length ◽  
Closed Field ◽  
Power Pulse ◽  
Phase Structures ◽  
Microstructure And Mechanical Properties ◽  
High Power Pulse

CrNx coatings were deposited by high power pulse magnetron sputtering in a closed field unbalanced system. The influence of pulse width on microstructure and mechanical properties of CrNx coatings was examined. Morphologies different from those fabricated by traditional magnetron sputtering were obtained, phase structures were also changed in the process. The coatings hardness were always improved in the increasing pulse length, while the best adhension of CrNx coatings about 25N was get when pulse length was 60us.

X-ray reflectivity and diffraction investigation on TiN/SiNx nanolayered coatings deposited by magnetron sputtering

2007 ◽  
Vol 22 (4) ◽  
pp. 316-318
Author(s):  
Tao An ◽  
Hongwei Tian ◽  
Weitao Zheng
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Multilayer Coatings ◽  
Substrate Bias ◽  
Reactive Magnetron ◽  
Maximum Hardness ◽  
X Ray Diffraction ◽  
Substrate Bias Voltage ◽  
X Ray ◽  
Sharp Interfaces

Polycrystalline TiN/SiNx multilayer coatings were deposited by reactive magnetron sputtering from Ti and Si targets. Interfaces, structures, and mechanical properties of the multilayers were characterized using X-ray reflectivity (XRR), X-ray diffraction (XRD), and nanoindentation analyses. Results showed that substrate bias voltage had a significant influence on the structures and mechanical properties of the multilayer coatings, in which sharp interfaces are responsible for an enhancement of mechanical properties of the multilayer coatings. The maximum hardness occurs at the −80 V coating with the sharpest interface and the strongest [200] preferred orientation.

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