Design and fabrication of large-area tunable MOEMS-based shortwave infrared Fabry-Pérot filters
2019 ◽
Vol 37
(3)
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pp. 032002
2017 ◽
Vol 23
(2)
◽
pp. 45-52
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2016 ◽
Vol 166
◽
pp. 50-54
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2019 ◽
Keyword(s):
2015 ◽
Vol 3
(12)
◽
pp. 1779-1786
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Keyword(s):