scholarly journals In situ XPS study on atomic layer etching of Fe thin film using Cl2 and acetylacetone

2018 ◽  
Vol 36 (5) ◽  
pp. 051401 ◽  
Author(s):  
Xi Lin ◽  
Meixi Chen ◽  
Anderson Janotti ◽  
Robert Opila
Keyword(s):  
Thin Film ◽  
Atomic Layer ◽  
In Situ Xps ◽  
Xps Study ◽  
Atomic Layer Etching

In situ XPS study of low temperature atomic layer deposition of B2O3 films on Si using BCl3 and H2O precursors

2018 ◽  
Vol 36 (6) ◽  
pp. 061503 ◽  
Author(s):  
Aparna Pilli ◽  
Jessica Jones ◽  
Veronica Lee ◽  
Natasha Chugh ◽  
Jeffry Kelber ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Xps ◽  
Layer Deposition ◽  
Xps Study

scholarly journals Reactivity of mesoporous carbon against water – An in-situ XPS study

Carbon ◽  
2014 ◽  
Vol 77 ◽  
pp. 175-183 ◽  
Author(s):  
Sylvia Reiche ◽  
Raoul Blume ◽  
Xiao Chen Zhao ◽  
Dangsheng Su ◽  
Edward Kunkes ◽  
...  
Keyword(s):  
Mesoporous Carbon ◽  
In Situ Xps ◽  
Xps Study

In-situ XPS study of ALD ZnO passivation of p-In0.53Ga0.47As

2015 ◽  
Vol 11 (5) ◽  
pp. 769-774 ◽  
Author(s):  
Antonio T. Lucero ◽  
Young-Chul Byun ◽  
Xiaoye Qin ◽  
Lanxia Cheng ◽  
Hyoungsub Kim ◽  
...  
Keyword(s):  
In Situ Xps ◽  
Xps Study

In-Situ XPS Study of Etch Chemistry of Methane-Based RIBE of InP Using N2

2000 ◽  
Author(s):  
Zhi Jin ◽  
Hiroshi Takahashi ◽  
Tamotsu Hashizume ◽  
Hideki Hasegawa
Keyword(s):  
In Situ Xps ◽  
Xps Study

“In situ” XPS study of band structures at Cu2O/TiO2 heterojunctions interface

2009 ◽  
Vol 603 (17) ◽  
pp. 2825-2834 ◽  
Author(s):  
Lei Huang ◽  
Feng Peng ◽  
Fumio S. Ohuchi
Keyword(s):  
Band Structures ◽  
In Situ Xps ◽  
Xps Study
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