Grazing-incidence small angle x-ray scattering, x-ray reflectivity, and atomic force microscopy: A combined approach to assess atomic-layer-deposited Al2O3 dielectric films

2018 ◽  
Vol 36 (1) ◽  
pp. 01A115
Author(s):  
Chao Li ◽  
Firouz Shahriarian ◽  
Mark S. Goorsky
Keyword(s):  
Atomic Force Microscopy ◽  
Small Angle ◽  
Atomic Layer ◽  
Grazing Incidence ◽  
Dielectric Films ◽  
Combined Approach ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force

Ordering of self-assembledSi1−xGexislands studied by grazing incidence small-angle x-ray scattering and atomic force microscopy

1998 ◽  
Vol 58 (16) ◽  
pp. 10523-10531 ◽  
Author(s):  
M. Schmidbauer ◽  
Th. Wiebach ◽  
H. Raidt ◽  
M. Hanke ◽  
R. Köhler ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Ray Scattering

Microstructure Determination of AOT + Phenol Organogels Utilizing Small-Angle X-ray Scattering and Atomic Force Microscopy

2001 ◽  
Vol 123 (10) ◽  
pp. 2414-2421 ◽  
Author(s):  
Blake A. Simmons ◽  
Chad E. Taylor ◽  
Forrest A. Landis ◽  
Vijay T. John ◽  
Gary L. McPherson ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Small Angle ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Ray Scattering

Nanometer surface gratings on Si(100) characterized by x-ray scattering under grazing incidence and atomic force microscopy

1997 ◽  
Vol 81 (3) ◽  
pp. 1212-1216 ◽  
Author(s):  
T. H. Metzger ◽  
K. Haj-Yahya ◽  
J. Peisl ◽  
M. Wendel ◽  
H. Lorenz ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Grazing Incidence ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Ray Scattering

Nanostructure of the neurocentral growth plate: Insight from scanning small angle X-ray scattering, atomic force microscopy and scanning electron microscopy

Bone ◽  
2006 ◽  
Vol 39 (3) ◽  
pp. 530-541 ◽  
Author(s):  
Mathias Hauge Bünger ◽  
Morten Foss ◽  
Kurt Erlacher ◽  
Mads Bruun Hovgaard ◽  
Jacques Chevallier ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Atomic Force Microscopy ◽  
Growth Plate ◽  
Small Angle ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Scanning Electron

scholarly journals Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy

2016 ◽  
Vol 49 (3) ◽  
pp. 823-834 ◽  
Author(s):  
Hyo Seon Suh ◽  
Xuanxuan Chen ◽  
Paulina A. Rincon-Delgadillo ◽  
Zhang Jiang ◽  
Joseph Strzalka ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Grazing Incidence ◽  
Line Edge Roughness ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Edge Roughness ◽  
Average Shape ◽  
Polymer Gratings

Grazing-incidence small-angle X-ray scattering (GISAXS) is increasingly used for the metrology of substrate-supported nanoscale features and nanostructured films. In the case of line gratings, where long objects are arranged with a nanoscale periodicity perpendicular to the beam, a series of characteristic spots of high-intensity (grating truncation rods, GTRs) are recorded on a two-dimensional detector. The intensity of the GTRs is modulated by the three-dimensional shape and arrangement of the lines. Previous studies aimed to extract an average cross-sectional profile of the gratings, attributing intensity loss at GTRs to sample imperfections. Such imperfections are just as important as the average shape when employing soft polymer gratings which display significant line-edge roughness. Herein are reported a series of GISAXS measurements of polymer line gratings over a range of incident angles. Both an average shape and fluctuations contributing to the intensity in between the GTRs are extracted. The results are critically compared with atomic force microscopy (AFM) measurements, and it is found that the two methods are in good agreement if appropriate corrections for scattering from the substrate (GISAXS) and contributions from the probe shape (AFM) are accounted for.

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