Effect of scan speed on moisture barrier properties of aluminum oxide using spatial atomic layer deposition

2017 ◽  
Vol 35 (2) ◽  
pp. 021514 ◽  
Author(s):  
Seokyoon Shin ◽  
Hagyoung Choi ◽  
Giyul Ham ◽  
Joohyun Park ◽  
Juhyun Lee ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Barrier Properties ◽  
Moisture Barrier ◽  
Layer Deposition ◽  
Scan Speed

Moisture Barrier Properties of Al2O3Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures

2013 ◽  
Vol 52 (3R) ◽  
pp. 035502 ◽  
Author(s):  
Hagyoung Choi ◽  
Sanghun Lee ◽  
Hyunsoo Jung ◽  
Seokyoon Shin ◽  
Giyul Ham ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Barrier Properties ◽  
Remote Plasma ◽  
Moisture Barrier ◽  
Layer Deposition

Improving the photodetection and stability of a visible-light QDs/ZnO phototransistor via an Al2O3 additional layer

2021 ◽  
Author(s):  
Sungho Park ◽  
Byung Jun Kim ◽  
Tae Yeon Kim ◽  
Eui Young Jung ◽  
Kyu-Myung Lee ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Quantum Dot ◽  
Aluminum Oxide ◽  
Thin Layer ◽  
Visible Light ◽  
Atomic Layer ◽  
Zno Films ◽  
Additional Layer ◽  
Layer Deposition

We have developed a visible-light phototransistor with excellent photodetection characteristics and stability via atomic layer deposition (ALD) to add a thin layer of aluminum oxide (Al2O3) to quantum dot (QD)/zinc oxide (ZnO) films.

Tuning the Composition and Nanostructure of Pt/Ir Films via Anodized Aluminum Oxide Templated Atomic Layer Deposition

2010 ◽  
Vol 20 (18) ◽  
pp. 3099-3105 ◽  
Author(s):  
David J. Comstock ◽  
Steven T. Christensen ◽  
Jeffrey W. Elam ◽  
Michael J. Pellin ◽  
Mark C. Hersam
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Anodized Aluminum ◽  
Anodized Aluminum Oxide ◽  
Layer Deposition
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