High-resolution, high-aspect-ratio iridium–nickel composite nanoimprint molds
2016 ◽
Vol 34
(6)
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pp. 061804
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Keyword(s):
1998 ◽
Keyword(s):
2019 ◽
Vol 5
(5)
◽
pp. 1800991
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Keyword(s):
2018 ◽
Vol 3
(5)
◽
pp. 1700321
◽
2018 ◽
Vol 57
(48)
◽
pp. 16335-16346
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