Analysis of compositional uniformity in AlxGa1−xN thin films using atom probe tomography and electron microscopy

Fang Liu; Li Huang; Lisa M. Porter; Robert F. Davis; Daniel K. Schreiber

doi:10.1116/1.4953410

Analysis of compositional uniformity in AlxGa1−xN thin films using atom probe tomography and electron microscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4953410 ◽

2016 ◽

Vol 34 (4) ◽

pp. 041510 ◽

Cited By ~ 2

Author(s):

Fang Liu ◽

Li Huang ◽

Lisa M. Porter ◽

Robert F. Davis ◽

Daniel K. Schreiber

Keyword(s):

Electron Microscopy ◽

Thin Films ◽

Atom Probe Tomography ◽

Atom Probe ◽

Compositional Uniformity

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Atom Probe Tomography and analytical Scanning Transmission Electron Microscopy of Rapid Solidification Microstructures in Al-Cu Alloy Thin Films

Microscopy and Microanalysis ◽

10.1017/s143192761700410x ◽

2017 ◽

Vol 23 (S1) ◽

pp. 688-689

Author(s):

Jorg M.K. Wiezorek ◽

Kai W. Zweiacker ◽

Can Liu ◽

Isabelle Martin ◽

Ty. J. Prosa ◽

...

Keyword(s):

Electron Microscopy ◽

Thin Films ◽

Transmission Electron Microscopy ◽

Atom Probe Tomography ◽

Scanning Transmission Electron Microscopy ◽

Atom Probe ◽

Cu Alloy ◽

Transmission Electron ◽

Scanning Transmission ◽

Solidification Microstructures

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On spinodal decomposition in Cu–34 at.% Ta thin films – An atom probe tomography and transmission electron microscopy study

Acta Materialia ◽

10.1016/j.actamat.2015.01.073 ◽

2015 ◽

Vol 89 ◽

pp. 181-192 ◽

Cited By ~ 26

Author(s):

Claudia M. Müller ◽

Alla S. Sologubenko ◽

Stephan S.A. Gerstl ◽

Ralph Spolenak

Keyword(s):

Electron Microscopy ◽

Thin Films ◽

Transmission Electron Microscopy ◽

Spinodal Decomposition ◽

Atom Probe Tomography ◽

Atom Probe ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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Correlating Interfacial Structure and Magnetism in Fe-MgO Thin Films Using Electron Microscopy, Neutron Reflectometry, and Atom Probe Tomography

Microscopy and Microanalysis ◽

10.1017/s1431927610060691 ◽

2010 ◽

Vol 16 (S2) ◽

pp. 1526-1527

Author(s):

SR Spurgeon ◽

CR Winkler ◽

BJ Kirby ◽

CL Johnson ◽

DN Seidman ◽

...

Keyword(s):

Electron Microscopy ◽

Thin Films ◽

Atom Probe Tomography ◽

Atom Probe ◽

Neutron Reflectometry ◽

Interfacial Structure

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

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Factors limiting the doping efficiency in atomic layer deposited ZnO:Al thin films: a dopant distribution study by transmission electron microscopy and atom probe tomography

European Microscopy Congress 2016: Proceedings ◽

10.1002/9783527808465.emc2016.6528 ◽

2016 ◽

pp. 888-889

Author(s):

Marcel Verheijen ◽

Yizhi Wu ◽

Devin Giddings ◽

Ty Prosa ◽

David Larson ◽

...

Keyword(s):

Electron Microscopy ◽

Thin Films ◽

Transmission Electron Microscopy ◽

Atom Probe Tomography ◽

Atomic Layer ◽

Atom Probe ◽

Dopant Distribution ◽

Distribution Study ◽

Transmission Electron

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Tetragonal fcc-Fe induced by κ -carbide precipitates: Atomic scale insights from correlative electron microscopy, atom probe tomography, and density functional theory

Physical Review Materials ◽

10.1103/physrevmaterials.2.023804 ◽

2018 ◽

Vol 2 (2) ◽

Cited By ~ 8

Author(s):

Christian H. Liebscher ◽

Mengji Yao ◽

Poulumi Dey ◽

Marta Lipińska-Chwalek ◽

Benjamin Berkels ◽

...

Keyword(s):

Electron Microscopy ◽

Density Functional Theory ◽

Atom Probe Tomography ◽

Density Functional ◽

Atom Probe ◽

Atomic Scale ◽

Functional Theory

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Interdiffusion in as-deposited Ni/Ti multilayer thin films analyzed by atom probe tomography

Materials Letters ◽

10.1016/j.matlet.2018.10.085 ◽

2019 ◽

Vol 236 ◽

pp. 92-95 ◽

Cited By ~ 4

Author(s):

Hisham Aboulfadl ◽

Fabian Seifried ◽

Michael Stüber ◽

Frank Mücklich

Keyword(s):

Thin Films ◽

Atom Probe Tomography ◽

Atom Probe ◽

Multilayer Thin Films

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Origins of meteoritic nanodiamonds investigated by coordinated atom‐probe tomography and transmission electron microscopy studies

Meteoritics and Planetary Science ◽

10.1111/maps.13373 ◽

2019 ◽

Vol 55 (6) ◽

pp. 1382-1403 ◽

Cited By ~ 1

Author(s):

Josiah B. Lewis ◽

Christine Floss ◽

Dieter Isheim ◽

Tyrone L. Daulton ◽

David N. Seidman ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Atom Probe Tomography ◽

Atom Probe ◽

Transmission Electron

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Spinodal decomposition of Ti0.33Al0.67N thin films studied by atom probe tomography

Thin Solid Films ◽

10.1016/j.tsf.2012.02.085 ◽

2012 ◽

Vol 520 (13) ◽

pp. 4362-4368 ◽

Cited By ~ 52

Author(s):

L.J.S. Johnson ◽

M. Thuvander ◽

K. Stiller ◽

M. Odén ◽

L. Hultman

Keyword(s):

Thin Films ◽

Spinodal Decomposition ◽

Atom Probe Tomography ◽

Atom Probe

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An Integrated Workflow To Investigate Electrocatalytic Surfaces By Correlative X-ray Photoemission Spectroscopy, Scanning Photoemission Electron Microscopy and Atom Probe Tomography

Microscopy and Microanalysis ◽

10.1017/s1431927619002265 ◽

2019 ◽

Vol 25 (S2) ◽

pp. 306-307

Author(s):

Kevin Schweinar ◽

Olga Kasian ◽

Rachel L. Nicholls ◽

Catherine R. Rajamathi ◽

Patrick Zeller ◽

...

Keyword(s):

Electron Microscopy ◽

Atom Probe Tomography ◽

Atom Probe ◽

Photoemission Spectroscopy ◽

Photoemission Electron Microscopy ◽

X Ray ◽

Photoemission Electron

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Atom probe tomography study of GaMnN thin films

physica status solidi (c) ◽

10.1002/pssc.201100344 ◽

2012 ◽

Vol 9 (3-4) ◽

pp. 723-726

Author(s):

Robert Nicholas ◽

David Diercks ◽

Matthew Kane

Keyword(s):

Thin Films ◽

Atom Probe Tomography ◽

Atom Probe

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