Dose performance characterization of extreme ultraviolet exposure system using enhanced energy sensitivity by resist contrast method

2016 ◽  
Vol 34 (4) ◽  
pp. 041602 ◽  
Author(s):  
Insung Kim ◽  
JinSeok Heo ◽  
Changmin Park ◽  
Myeongsu Hwang ◽  
Seong-Sue Kim ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Performance Characterization ◽  
Exposure System ◽  
Ultraviolet Exposure ◽  
Contrast Method

Ring-Field Extreme Ultraviolet Exposure System Using Aspherical Mirrors

1998 ◽  
Vol 37 (Part 1, No. 12B) ◽  
pp. 6750-6755 ◽  
Author(s):  
Katsuhiko Murakami ◽  
Tetsuya Oshino ◽  
Hiroo Kinoshita ◽  
Takeo Watanabe ◽  
Masato Niibe ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Exposure System ◽  
Ultraviolet Exposure ◽  
Aspherical Mirrors

scholarly journals Performance Characterization of Composite Powders for 3D Printing

2021 ◽  
Vol 714 (3) ◽  
pp. 032070
Author(s):  
Xiangjun Bi ◽  
Hongjie Zhao ◽  
Yuanxun Gong ◽  
Xinghong Zhou
Keyword(s):  
3D Printing ◽  
Composite Powders ◽  
Performance Characterization

Design, Installation, and Performance Characterization of a Laboratory-Scale Solar Thermal System for Experiments in Solar Energy Utilization

2012 ◽  
Author(s):  
Stephanie Drozek ◽  
Christopher Damm ◽  
Ryan Enot ◽  
Andrew Hjortland ◽  
Brandon Jackson ◽  
...  
Keyword(s):  
Renewable Energy ◽  
Solar Energy ◽  
Laboratory Scale ◽  
Energy Utilization ◽  
Solar Thermal ◽  
Thermal System ◽  
Performance Characterization ◽  
And Performance ◽  
Solar Thermal System

The purpose of this paper is to describe the implementation of a laboratory-scale solar thermal system for the Renewable Energy Systems Laboratory at the Milwaukee School of Engineering (MSOE). The system development began as a student senior design project where students designed and fabricated a laboratory-scale solar thermal system to complement an existing commercial solar energy system on campus. The solar thermal system is designed specifically for educating engineers. This laboratory equipment, including a solar light simulator, allows for variation of operating parameters to investigate their impact on system performance. The equipment will be utilized in two courses: Applied Thermodynamics, and Renewable Energy Utilization. During the solar thermal laboratories performed in these courses, students conduct experiments based on the American Society of Heating, Refrigeration and Air-Conditioning Engineers (ASHRAE) 93-2010 standard for testing and performance characterization of solar thermal systems. Their measurements are then used to quantify energy output, efficiency and losses of the system and subsystem components.

Performance characterization of a harmonically mode-locked erbium fiber ring laser

1995 ◽  
Vol 7 (2) ◽  
pp. 152-154 ◽  
Author(s):  
J.S. Wey ◽  
J. Goldhar ◽  
D.W. Rush ◽  
M.W. Chbat ◽  
G.M. Carter ◽  
...  
Keyword(s):  
Ring Laser ◽  
Fiber Ring Laser ◽  
Fiber Ring ◽  
Performance Characterization
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