SIMS depth profiling and topography studies of repetitive III–V trenches under low energy oxygen ion beam sputtering

2016 ◽  
Vol 34 (3) ◽  
pp. 03H131
Author(s):  
Viktoriia Gorbenko ◽  
Franck Bassani ◽  
Alexandre Merkulov ◽  
Thierry Baron ◽  
Mickael Martin ◽  
...  
Keyword(s):  
Ion Beam ◽  
Depth Profiling ◽  
Low Energy ◽  
Ion Beam Sputtering ◽  
Oxygen Ion ◽  
Beam Sputtering ◽  
Sims Depth Profiling

Ion beam sputtering of SnO2 with low energy oxygen ion beams

1999 ◽  
Vol 341 (1-2) ◽  
pp. 230-233 ◽  
Author(s):  
Y.-S Choe ◽  
J.-H Chung ◽  
D.-S Kim ◽  
H.K Baik
Keyword(s):  
Ion Beam ◽  
Ion Beams ◽  
Low Energy ◽  
Ion Beam Sputtering ◽  
Oxygen Ion ◽  
Beam Sputtering

Ion Beam Sputtering for High Resolution Depth Profiling

2009 ◽  
Vol 15 (3) ◽  
pp. 216-219 ◽  
Author(s):  
Hee Jae Kang ◽  
Dae Won Moon ◽  
Hyung-Ik Lee
Keyword(s):  
High Resolution ◽  
Ion Beam ◽  
Depth Profiling ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Topographical changes induced by low energy ion beam sputtering at oblique incidence

1983 ◽  
Vol 77 (3-4) ◽  
pp. 177-193 ◽  
Author(s):  
Ren Cong-xin ◽  
Chen Guo-Ming ◽  
Fu Xtn-Ding ◽  
Yang Jie ◽  
Fang Hong-Li ◽  
...  
Keyword(s):  
Oblique Incidence ◽  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Sputtering ◽  
Beam Sputtering
Sign in / Sign up

Export Citation Format

Share Document