Spatially resolved electron density and electron energy distribution function in Ar magnetron plasmas used for sputter-deposition of ZnO-based thin films

2015 ◽  
Vol 33 (6) ◽  
pp. 061310 ◽  
Author(s):  
L. Maaloul ◽  
R. K. Gangwar ◽  
S. Morel ◽  
L. Stafford
Keyword(s):  
Thin Films ◽  
Distribution Function ◽  
Energy Distribution ◽  
Electron Density ◽  
Electron Energy ◽  
Electron Energy Distribution Function ◽  
Sputter Deposition ◽  
Energy Distribution Function ◽  
Electron Energy Distribution ◽  
Spatially Resolved

Electron Energy Distribution Function (0 — 40 eV Range) in Helium in a Longitudinal Hollow-Cathode Discharge Used for Lasers

1987 ◽  
Vol 42 (6) ◽  
pp. 587-592
Author(s):  
Jerzy Mizeraczyk
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Electron Density ◽  
Electron Energy ◽  
Hollow Cathode ◽  
Electron Energy Distribution Function ◽  
Hollow Cathode Discharge ◽  
Energy Distribution Function ◽  
Electron Energy Distribution ◽  
Metal Vapour

This paper presents results of measurements of the electron energy distribution function (EEDF) in the range 0 - 40 eV, and the electron density and the space potential for the helium plasma of a longitudinal discharge in a hollow cathode as used for He-inert gas and He-metal vapour lasers. The results show that the EEDF and also the mean electron energy, the electron density and the plasma potential differ from those typical of the transverse hollow-cathode discharge.

Electron Energy Distribution Function Measured by Electrostatic Probes at Divertor Plasma in JFT-2M Tokamak

2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Electron Energy ◽  
Electron Energy Distribution Function ◽  
Energy Distribution Function ◽  
Electron Energy Distribution
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