Optimizing the discharge voltage in magnetron sputter deposition of high quality Al-doped ZnO thin films

2015 ◽  
Vol 33 (6) ◽  
pp. 061503 ◽  
Author(s):  
Fanping Meng ◽  
Shou Peng ◽  
Genbao Xu ◽  
Yun Wang ◽  
Fangfang Ge ◽  
...  
Keyword(s):  
Thin Films ◽  
Discharge Voltage ◽  
Sputter Deposition ◽  
Zno Thin Films ◽  
High Quality ◽  
Magnetron Sputter Deposition ◽  
Doped Zno ◽  
Magnetron Sputter

Fabrication of p-Type ZnO Thin Films Using rf-Magnetron Sputter Deposition

2009 ◽  
Vol 12 (4) ◽  
pp. H109 ◽  
Author(s):  
Jun Kwan Kim ◽  
Jung Wook Lim ◽  
Hyun Tak Kim ◽  
Sang Hoon Kim ◽  
Sun Jin Yun
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Zno Thin Films ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter ◽  
P Type

Structure of uniform and high-quality Al-doped ZnO films by magnetron sputter deposition at low temperatures

2018 ◽  
Vol 665 ◽  
pp. 109-116 ◽  
Author(s):  
Fanping Meng ◽  
Shou Peng ◽  
Genbao Xu ◽  
Yun Wang ◽  
Fangfang Ge ◽  
...  
Keyword(s):  
Low Temperatures ◽  
Sputter Deposition ◽  
Zno Films ◽  
High Quality ◽  
Magnetron Sputter Deposition ◽  
Doped Zno ◽  
Magnetron Sputter

Single‐target magnetron sputter deposition of high‐Tcsuperconducting Bi‐Sr‐Ca‐Cu‐O thin films

1988 ◽  
Vol 64 (10) ◽  
pp. 5259-5261 ◽  
Author(s):  
Neelkanth G. Dhere ◽  
John P. Goral ◽  
Alice R. Mason ◽  
Ramesh G. Dhere ◽  
Ronald H. Ono
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Single Target ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Single composite target magnetron sputter deposition of crystalline and amorphous SiC thin films

2018 ◽  
Vol 5 (3) ◽  
pp. 036410 ◽  
Author(s):  
Poreddy Chaitanya Akshara ◽  
Guruswamy Rajaram ◽  
M Ghanashyam Krishna
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Composite Target ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Amorphous Sic
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