Influence of microwave annealing on optical and electrical properties of plasma-induced defect structures in Si substrate
2015 ◽
Vol 33
(6)
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pp. 061403
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2011 ◽
Vol 47
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pp. 899-906
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2017 ◽
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pp. 1-9
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2020 ◽
Vol 34
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pp. 2050068
2005 ◽
Vol 49
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2003 ◽
Vol 14
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pp. 149-153