scholarly journals Low-temperature growth of low friction wear-resistant amorphous carbon nitride thin films by mid-frequency, high power impulse, and direct current magnetron sputtering

2015 ◽  
Vol 33 (5) ◽  
pp. 05E112 ◽  
Author(s):  
Konstantinos D. Bakoglidis ◽  
Susann Schmidt ◽  
Magnus Garbrecht ◽  
Ivan G. Ivanov ◽  
Jens Jensen ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Amorphous Carbon ◽  
Direct Current ◽  
Carbon Nitride ◽  
Low Friction ◽  
Temperature Growth ◽  
Direct Current Magnetron Sputtering ◽  
Amorphous Carbon Nitride

Reversible photo-induced deformation of amorphous carbon nitride thin films

2014 ◽  
Vol 41 ◽  
pp. 20-24 ◽  
Author(s):  
M. Aono ◽  
T. Harata ◽  
N. Kitazawa ◽  
Y. Watanabe
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Amorphous Carbon Nitride

Effects of Continuous and Discontinuous Deposition Time in Reactive Direct Current Magnetron Sputtering of Titanium Dioxide Thin Films

2015 ◽  
Vol 1131 ◽  
pp. 251-254
Author(s):  
Montri Aiempanakit ◽  
Chantana Salawan ◽  
Kamon Aiempanakit
Keyword(s):  
Thin Films ◽  
Grain Size ◽  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Deposition Time ◽  
Spherical Shape ◽  
Contact Angles ◽  
Water Contact ◽  
Direct Current Magnetron Sputtering

The effect of continuous and discontinuous deposition time on the properties of TiO2 thin films deposited by reactive direct current magnetron sputtering (DCMS) on glass substrates was investigated. The deposition processes were designed for a condition of continuous deposition time D1 (60 min) and three conditions of discontinuous deposition time D2 (30 min × 2 times), D3 (15 min × 4 times), and D4 (1 min × 60 times). The crystal structure, surface morphology, and hydrophilicity of TiO2 thin films were characterized by X-ray diffraction, atomic force microscope, and water contact angle method, respectively. It was found that the increasing of discontinuous deposition time (conditions from D1 to D4) shows the changing of grain size from big grain size with spherical shape to small grain size with oval shape. The crystallinity of TiO2 films decrease with increasing the discontinuous deposition time. The water contact angles also decrease as a function of increasing discontinuous deposition time. These results may be explained from the accumulation of heat on the substrate which affected the phase composition and surface morphology of TiO2 thin films.

Electrical resistivity response of amorphous carbon nitride thin films in various gas atmospheres

2015 ◽  
Vol 54 (4) ◽  
pp. 041401 ◽  
Author(s):  
Naoyuki Tamura ◽  
Masami Aono ◽  
Hiroshi Abe ◽  
Nobuaki Kitazawa ◽  
Yoshihisa Watanabe
Keyword(s):  
Thin Films ◽  
Electrical Resistivity ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Amorphous Carbon Nitride

scholarly journals Hall mobility of cuprous oxide thin films deposited by reactive direct-current magnetron sputtering

2011 ◽  
Vol 98 (19) ◽  
pp. 192115 ◽  
Author(s):  
Yun Seog Lee ◽  
Mark T. Winkler ◽  
Sin Cheng Siah ◽  
Riley Brandt ◽  
Tonio Buonassisi
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Hall Mobility ◽  
Cuprous Oxide ◽  
Oxide Thin Films ◽  
Direct Current Magnetron Sputtering

Influence of Zr Doping on the Tribological Properties of Amorphous Carbon-Nitride Coating

2019 ◽  
Vol 823 ◽  
pp. 9-14
Author(s):  
Yen Liang Su ◽  
Sun Hui Yao ◽  
Yu Chen Lai ◽  
Huang Ming Wu
Keyword(s):  
Magnetron Sputtering ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Tribological Behavior ◽  
Nitride Coating ◽  
Wear Performance ◽  
Amorphous Carbon Nitride ◽  
Pin On Disk ◽  
Nanohardness Tester ◽  
Sputtering System

This study aimed to understand the influence of small amount of Zr doping of amorphous carbonitride (a-CN) coatings on the structure, and mechanical and tribological behavior. The coatings were prepared using a four-target close-field unbalance magnetron sputtering system; two graphite, one Ti and one Zr targets were used. GDOS, SEM, XRD and XPS were used. A surface profilometer, a nanohardness tester, and a pin-on-disk wear tester were used. It was found the Zr doping resulting in the formation of ZrC and ZrN phases within the coating and the increase in the sp3 bonding fraction. The nanohardness was increased and the wear performance was largely improved.

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