Novel hard, tough HfAlSiN multilayers, defined by alternating Si bond structure, deposited using modulated high-flux, low-energy ion irradiation of the growing film
2015 ◽
Vol 33
(5)
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pp. 05E103
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2016 ◽
Vol 478
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pp. 287-294
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Keyword(s):
2015 ◽
Vol 467
◽
pp. 244-250
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Keyword(s):
2002 ◽
Vol 20
(6)
◽
pp. 2007
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