scholarly journals Novel hard, tough HfAlSiN multilayers, defined by alternating Si bond structure, deposited using modulated high-flux, low-energy ion irradiation of the growing film

2015 ◽  
Vol 33 (5) ◽  
pp. 05E103 ◽  
Author(s):  
Hanna Fager ◽  
Brandon M. Howe ◽  
Grzegorz Greczynski ◽  
Jens Jensen ◽  
A. B. Mei ◽  
...  
Keyword(s):  
Vacuum ◽  
2003 ◽  
Vol 72 (2) ◽  
pp. 161-168 ◽  
Author(s):  
L. Pranevicius ◽  
L.L. Pranevicius ◽  
D. Milcius ◽  
S. Muzard ◽  
C. Templier ◽  
...  

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
T. J. Novakowski ◽  
J. K. Tripathi ◽  
A. Hassanein

2016 ◽  
Vol 362 ◽  
pp. 35-41 ◽  
Author(s):  
T.J. Novakowski ◽  
J.K. Tripathi ◽  
G.M. Hosinski ◽  
G. Joseph ◽  
A. Hassanein

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