Measurements and modeling of the impact of weak magnetic fields on the plasma properties of a planar slot antenna driven plasma source
2015 ◽
Vol 33
(3)
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pp. 031303
Keyword(s):
2013 ◽
Vol 31
(3)
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pp. 031306
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2019 ◽
Keyword(s):
Keyword(s):
2014 ◽
Vol 78
(11)
◽
pp. 1169-1173
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