Tunable electrical properties of TaNx thin films grown by ionized physical vapor deposition
2014 ◽
Vol 32
(5)
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pp. 051202
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Keyword(s):
2011 ◽
Vol 56
(2)
◽
pp. 24002
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Keyword(s):
1992 ◽
Vol 14
(1)
◽
pp. 23-29
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1998 ◽
Vol 16
(2)
◽
pp. 532
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Keyword(s):
2006 ◽
Vol 6
(11)
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pp. 3479-3482