Low-temperature CVD of iron, cobalt, and nickel nitride thin films from bis[di(tert-butyl)amido]metal(II) precursors and ammonia
2014 ◽
Vol 32
(2)
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pp. 020606
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1975 ◽
Vol 14
(6)
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pp. 438-441
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1987 ◽
Vol 67
(1)
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pp. 130-138
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2011 ◽
Vol 3
(7)
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pp. 2410-2416
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1988 ◽
Vol 46
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pp. 788-789
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