Conformal Polymeric Thin Films by Low-Temperature Rapid Initiated Chemical Vapor Deposition (iCVD) Using tert-Butyl Peroxybenzoate as an Initiator

2011 ◽  
Vol 3 (7) ◽  
pp. 2410-2416 ◽  
Author(s):  
Jingjing Xu ◽  
Karen K. Gleason
2007 ◽  
Vol 515 (5) ◽  
pp. 2921-2925 ◽  
Author(s):  
Chunyu Wang ◽  
Volker Cimalla ◽  
Genady Cherkashinin ◽  
Henry Romanus ◽  
Majdeddin Ali ◽  
...  

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