Gain and loss mechanisms for neutral species in low pressure fluorocarbon plasmas by infrared spectroscopy
2012 ◽
Vol 30
(5)
◽
pp. 051308
◽
Keyword(s):
2003 ◽
Vol 12
(4)
◽
pp. 576-589
◽
2011 ◽
Vol 29
(1)
◽
pp. 179-186
◽
2018 ◽
Vol 232
(23)
◽
pp. 4312-4331
Keyword(s):
2012 ◽
Vol 30
(2)
◽
pp. 021305
◽
Keyword(s):
1992 ◽
Vol 23
(3)
◽
pp. 265-286
◽
Keyword(s):