Mutually beneficial doping of tellurium and nitrogen in ZnO films grown by metal-organic chemical vapor deposition

2012 ◽  
Vol 30 (5) ◽  
pp. 051508 ◽  
Author(s):  
Kun Tang ◽  
Shulin Gu ◽  
Jiandong Ye ◽  
Shunming Zhu ◽  
Shimin Huang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Zno Films ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Effect of total gas velocity on the growth of ZnO films by metal-organic chemical vapor deposition

2006 ◽  
Vol 514 (1-2) ◽  
pp. 306-309 ◽  
Author(s):  
Junjie Zhu ◽  
Ran Yao ◽  
Cihui Liu ◽  
In-Hwan Lee ◽  
Lala Zhu ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Zno Films ◽  
Gas Velocity ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Epitaxial Growth and Polarity of ZnO Films on Sapphire (0001) Substrates by Low-Pressure Metal Organic Chemical Vapor Deposition

2003 ◽  
Vol 42 (Part 1, No. 4B) ◽  
pp. 2291-2295 ◽  
Author(s):  
Bao-Ping Zhang ◽  
Le-Hong Manh ◽  
Katsuki Wakatsuki ◽  
Tsuyoshi Ohnishi ◽  
Mikk Lippmaa ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Organic Chemical ◽  
Zno Films ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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