Differences in erosion mechanism and selectivity between Ti and TiN in fluorocarbon plasmas for dielectric etch
2012 ◽
Vol 30
(4)
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pp. 041811
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1954 ◽
Vol 105
(2)
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pp. 268-268
2006 ◽
Vol 76A
(3)
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pp. 470-479
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Keyword(s):
1999 ◽
Vol 75
(7)
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pp. 792-799
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Keyword(s):