Twelve nanometer half-pitch W–Cr–HSQ trilayer process for soft x-ray tungsten zone plates

2011 ◽  
Vol 29 (6) ◽  
pp. 06FG02 ◽  
Author(s):  
Julia Reinspach ◽  
Fredrik Uhlén ◽  
Hans M. Hertz ◽  
Anders Holmberg
Keyword(s):  
X Ray ◽  
Zone Plates ◽  
Trilayer Process

scholarly journals Thermal stability of tungsten zone plates for focusing hard x-ray free-electron laser radiation

2012 ◽  
Vol 14 (4) ◽  
pp. 043010 ◽  
Author(s):  
D Nilsson ◽  
F Uhlén ◽  
J Reinspach ◽  
H M Hertz ◽  
A Holmberg ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Laser Radiation ◽  
Free Electron ◽  
Free Electron Laser ◽  
X Ray ◽  
Zone Plates ◽  
Thermal Stability Of

APD-based x-ray imaging telescope using Fresnel zone plates for extremely high spatial resolution

2005 ◽  
Author(s):  
Michael R. Squillante ◽  
Richard A. Myers ◽  
Mitchell Woodring ◽  
James F. Christian ◽  
Frank Robertson ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Fresnel Zone ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
X Ray Imaging ◽  
Imaging Telescope

A new ZEP520/P(MMA-MAA)/ZEP520 trilayer process for T-shaped gate using synchrotron-based proximity x-ray lithography

2005 ◽  
Author(s):  
Changqing Xie ◽  
Dapeng Chen ◽  
Jiebing Niu ◽  
Ming Liu ◽  
Tianchun Ye ◽  
...  
Keyword(s):  
X Ray ◽  
Trilayer Process

Tabletop x-ray microscope using 8 keV zone plates

1990 ◽  
Vol 29 (6) ◽  
pp. 576 ◽  
Author(s):  
Richard M. Bionta
Keyword(s):  
X Ray ◽  
Zone Plates

Investigation on the Preparation of High Precision Multilayer X-ray Fresnel Zone Plates Based on Atomic Layer Deposition Technology

2021 ◽  
Vol 50 (1) ◽  
pp. 156-164
Author(s):  
吴鹿杰 Lujie WU ◽  
文庆涛 Qingtao WEN ◽  
高雅增 Yazeng GAO ◽  
卢维尔 Weier LU ◽  
夏洋 Yang XIA ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
High Precision ◽  
Fresnel Zone ◽  
Atomic Layer ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
Layer Deposition ◽  
Deposition Technology

scholarly journals Multifocus off-axis zone plates for x-ray free-electron laser experiments

Optica ◽  
2020 ◽  
Vol 7 (8) ◽  
pp. 1007 ◽  
Author(s):  
Florian Döring ◽  
Benedikt Rösner ◽  
Manuel Langer ◽  
Adam Kubec ◽  
Armin Kleibert ◽  
...  
Keyword(s):  
Free Electron ◽  
Free Electron Laser ◽  
X Ray ◽  
Zone Plates ◽  
Laser Experiments

2-D X-ray laser-plasma imaging using Bragg Fresnel multilayer zone plates

1998 ◽  
Vol 155 (4-6) ◽  
pp. 398-405 ◽  
Author(s):  
H. Merdji ◽  
G. Soullié ◽  
M. Idir ◽  
G. Cauchon ◽  
A. Mirone ◽  
...  
Keyword(s):  
Laser Plasma ◽  
X Ray ◽  
Zone Plates ◽  
Plasma Imaging
Sign in / Sign up

Export Citation Format

Share Document