Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition

Reo Kometani; Kouki Yusa; Shin’ichi Warisawa; Sunao Ishihara

doi:10.1116/1.3504584

Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3504584 ◽

2010 ◽

Vol 28 (6) ◽

pp. C6F38-C6F41 ◽

Cited By ~ 7

Author(s):

Reo Kometani ◽

Kouki Yusa ◽

Shin’ichi Warisawa ◽

Sunao Ishihara

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Carbon Nanostructure ◽

Piezoresistive Effect ◽

Diamondlike Carbon

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Three-dimensional GaN nano-structure fabrication by focused ion beam chemical vapor deposition

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2005.08.130 ◽

2006 ◽

Vol 242 (1-2) ◽

pp. 250-252 ◽

Cited By ~ 1

Author(s):

T. Nagata ◽

P. Ahmet ◽

Y. Yamauchi ◽

Y. Sakuma ◽

T. Sekiguchi ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nano Structure

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Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.065001 ◽

2012 ◽

Vol 51 ◽

pp. 065001 ◽

Cited By ~ 3

Author(s):

Dengji Guo ◽

Reo Kometani ◽

Shin'ichi Warisawa ◽

Sunao Ishihara

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nanostructure Fabrication

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Three-dimensional and multimaterial microfabrication using focused-ion-beam chemical-vapor deposition and its application to processing nerve electrodes

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1821581 ◽

2004 ◽

Vol 22 (6) ◽

pp. 3158 ◽

Cited By ~ 8

Author(s):

T. Hoshino ◽

M. Kawamori ◽

T. Suzuki ◽

S. Matsui ◽

K. Mabuchi

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nerve Electrodes

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Nanoimprint using three-dimensional microlens mold made by focused-ion-beam chemical vapor deposition

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1633281 ◽

2004 ◽

Vol 22 (1) ◽

pp. 22 ◽

Cited By ~ 31

Author(s):

K. Watanabe ◽

T. Morita ◽

R. Kometani ◽

T. Hoshino ◽

K. Kondo ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor

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Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1319689 ◽

2000 ◽

Vol 18 (6) ◽

pp. 3181 ◽

Cited By ~ 330

Author(s):

Shinji Matsui ◽

Takashi Kaito ◽

Jun-ichi Fujita ◽

Masanori Komuro ◽

Kazuhiro Kanda ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nanostructure Fabrication

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THREE-DIMENSIONAL NANOSTRUCTURE FABRICATION BY FOCUSED-ION-BEAM CHEMICAL-VAPOR-DEPOSITION

Annual Review of Nano Research ◽

10.1142/9789814280525_0008 ◽

2009 ◽

pp. 351-383 ◽

Cited By ~ 1

Author(s):

Shinji Matsui

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nanostructure Fabrication

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Resistivity change of the diamondlike carbon, deposited by focused-ion-beam chemical vapor deposition, induced by the annealing treatment

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2978400 ◽

2008 ◽

Vol 26 (6) ◽

pp. 2628-2631 ◽

Cited By ~ 12

Author(s):

Reo Kometani ◽

Toshinari Ichihashi ◽

Kazuhiro Kanda ◽

Tsuneo Suzuki ◽

Koichi Niihara ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Annealing Treatment ◽

Chemical Vapor ◽

Resistivity Change ◽

Diamondlike Carbon

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Three-dimensional nanostructure fabrication by focused-Ion-beam chemical vapor deposition

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215282 ◽

2004 ◽

Cited By ~ 4

Author(s):

S. Matsui

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nanostructure Fabrication

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Miniaturization process of the three-dimensional nanostructure fabricated by focused-ion-beam chemical vapor deposition

Japanese Journal of Applied Physics ◽

10.35848/1347-4065/ac3525 ◽

2021 ◽

Author(s):

Reo Kometani ◽

Moe Katsuda

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor

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Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition

Springer Handbook of Nanotechnology ◽

10.1007/978-3-540-29857-1_6 ◽

2007 ◽

pp. 179-196 ◽

Cited By ~ 6

Author(s):

Shinji Matsui

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nanostructure Fabrication

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