Plasma doping two-dimensional characterization using low energy x-ray emission spectroscopy and full wafer secondary ion mass spectrometry/angle-resolved x-ray electron spectroscopy techniques

2010 ◽  
Vol 28 (1) ◽  
pp. C1D1-C1D4 ◽  
Author(s):  
Shu Qin ◽  
Wendy Morinville ◽  
Kent Zhuang ◽  
Francois Fabreguette ◽  
Allen McTeer ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Electron Spectroscopy ◽  
Emission Spectroscopy ◽  
Secondary Ion Mass Spectrometry ◽  
Low Energy ◽  
Two Dimensional ◽  
X Ray ◽  
Plasma Doping ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Secondary-ion mass spectrometry and x-ray photo-electron spectroscopy analyses of -irradiated Bi-2212 superconductors

1996 ◽  
Vol 29 (11) ◽  
pp. 2745-2749 ◽  
Author(s):  
A Bhattacharyay ◽  
P Rajasekar ◽  
P Chakraborty ◽  
S K Bandyopadhyay ◽  
P Barat ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Electron Spectroscopy ◽  
Secondary Ion Mass Spectrometry ◽  
X Ray ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Chromium implantation in silica glass

1996 ◽  
Vol 11 (1) ◽  
pp. 229-235 ◽  
Author(s):  
E. Cattaruzza ◽  
R. Bertoncello ◽  
F. Trivillin ◽  
P. Mazzoldi ◽  
G. Battaglin ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Photoelectron Spectroscopy ◽  
Silica Glass ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Secondary Ion Mass Spectrometry ◽  
Rutherford Backscattering Spectrometry ◽  
X Ray ◽  
Chromium Silicide ◽  
Secondary Ion

Silica glass was implanted with chromium at the energy of 35 and 160 keV and at fluences varying from 1 × 1016 to 11 × 1016 ions cm−2. In a set of chromium-implanted samples significant amounts of carbon were detected. Samples were characterized by x-ray photoelectron spectroscopy, x-ray-excited Auger electron spectroscopy, secondary ion mass spectrometry, and Rutherford backscattering spectrometry. Chromium silicide and chromium oxide compounds were observed; the presence of carbon in the implanted layers induces the further formation of chromium carbide species. Thermodynamic considerations applied to the investigated systems supply indications in agreement with the experimental evidences.

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