Application of neural network to controlling three-dimensional electron-beam exposure distribution in resist

2009 ◽  
Vol 27 (6) ◽  
pp. 2572 ◽  
Author(s):  
C. Guo ◽  
S.-Y. Lee ◽  
S. H. Lee ◽  
B.-G. Kim ◽  
H.-K. Cho
Keyword(s):  
Neural Network ◽  
Electron Beam ◽  
Three Dimensional ◽  
Dimensional Electron ◽  
Exposure Distribution

Evaluation of the dry resist octavinylsilsesquioxan and its application to three-dimensional electron-beam lithography

1996 ◽  
Author(s):  
Hans W. P. Koops ◽  
Sergey V. Babin ◽  
Mark A. Weber ◽  
G. Dahm ◽  
A. Holopkin ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Three Dimensional ◽  
Dimensional Electron

Three-Dimensional Electron-Beam Light Modulator

1973 ◽  
Vol 2 (6) ◽  
pp. 572-573
Author(s):  
É R Mustel' ◽  
S I Nikanorov ◽  
V N Parygin ◽  
G Kh Fridman
Keyword(s):  
Electron Beam ◽  
Three Dimensional ◽  
Dimensional Electron ◽  
Light Modulator

Three-dimensional electron-beam lithography simulator V2.0 for the gigabit-era photomask manufacturing

1997 ◽  
Author(s):  
Yoo-Hyon Kim ◽  
Byung-Cheol Cha ◽  
Hoong-Joo Lee ◽  
Jung-Min Sohn ◽  
Jeong-Taek Kong ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Three Dimensional ◽  
Dimensional Electron

Image Quality of Three-Dimensional Electron Beam Coronary Angiography

2002 ◽  
Vol 26 (2) ◽  
pp. 202-209 ◽  
Author(s):  
Bin Lu ◽  
Nan Zhuang ◽  
Song-Shou Mao ◽  
Hamid Bakhsheshi ◽  
Steve C. K. Liu ◽  
...  
Keyword(s):  
Electron Beam ◽  
Image Quality ◽  
Coronary Angiography ◽  
Three Dimensional ◽  
Dimensional Electron

Systematic verification of a three-dimensional electron beam dose calculation algorithm

1996 ◽  
Vol 23 (5) ◽  
pp. 685-693 ◽  
Author(s):  
Abel Cheng ◽  
William B. Harms ◽  
Russell L. Gerber ◽  
John W. Wong ◽  
James A. Purdy
Keyword(s):  
Electron Beam ◽  
Three Dimensional ◽  
Dose Calculation ◽  
Dimensional Electron ◽  
Calculation Algorithm ◽  
Dose Calculation Algorithm ◽  
Beam Dose
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