Measurement of electron temperatures and electron energy distribution functions in dual frequency capacitively coupled CF4/O2 plasmas using trace rare gases optical emission spectroscopy

2009 ◽  
Vol 27 (5) ◽  
pp. 1159-1165 ◽  
Author(s):  
Zhiying Chen ◽  
Vincent M. Donnelly ◽  
Demetre J. Economou ◽  
Lee Chen ◽  
Merritt Funk ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Electron Energy ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Distribution Functions ◽  
Dual Frequency ◽  
Rare Gases ◽  
Capacitively Coupled ◽  
Energy Distribution Functions

Analysis of optical emission spectroscopy in a dual-frequency capacitively coupled CHF3 plasma

2009 ◽  
Vol 16 (4) ◽  
pp. 043509 ◽  
Author(s):  
Xiao-Jiang Huang ◽  
Yu Xin ◽  
Lei Yang ◽  
Chao Ye ◽  
Qiang-Hua Yuan ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dual Frequency ◽  
Capacitively Coupled

CHF 3 Dual-Frequency Capacitively Coupled Plasma by Optical Emission Spectroscopy

2008 ◽  
Vol 25 (8) ◽  
pp. 2942-2945 ◽  
Author(s):  
Xu Yi-Jun ◽  
Ye Chao ◽  
Huang Xiao-Jiang ◽  
Yuan Jing ◽  
Xing Zhen-Yu ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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