Transparent conducting impurity-doped ZnO thin films prepared using oxide targets sintered by millimeter-wave heating

Tadatsugu Minami; Kenji Okada; Toshihiro Miyata; Juni-chi Nomoto; Youhei Hara; Hiroshi Abe

doi:10.1116/1.3119674

Transparent conducting impurity-doped ZnO thin films prepared using oxide targets sintered by millimeter-wave heating

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3119674 ◽

2009 ◽

Vol 27 (4) ◽

pp. 1006-1011 ◽

Cited By ~ 7

Author(s):

Tadatsugu Minami ◽

Kenji Okada ◽

Toshihiro Miyata ◽

Juni-chi Nomoto ◽

Youhei Hara ◽

...

Keyword(s):

Thin Films ◽

Millimeter Wave ◽

Zno Thin Films ◽

Transparent Conducting ◽

Wave Heating ◽

Impurity Doped ◽

Doped Zno

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Effect of thickness on the stability of transparent conducting impurity-doped ZnO thin films in a high humidity environment

physica status solidi (RRL) - Rapid Research Letters ◽

10.1002/pssr.200600009 ◽

2007 ◽

Vol 1 (1) ◽

pp. R31-R33 ◽

Cited By ~ 63

Author(s):

Tadatsugu Minami ◽

Toshihiro Miyata ◽

Yuusuke Ohtani ◽

Takeshi Kuboi

Keyword(s):

Thin Films ◽

Zno Thin Films ◽

High Humidity ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno ◽

The Stability ◽

High Humidity Environment ◽

Humidity Environment

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Effect of inserting a buffer layer on the characteristics of transparent conducting impurity-doped ZnO thin films prepared by dc magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.08.093 ◽

2010 ◽

Vol 519 (5) ◽

pp. 1587-1593 ◽

Cited By ~ 31

Author(s):

Jun-ichi Nomoto ◽

Jun-ichi Oda ◽

Toshihiro Miyata ◽

Tadatsugu Minami

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Reduction of obtainable resistivity in transparent conducting impurity-doped ZnO thin films prepared with a very thin buffer layer by magnetron sputtering

10.1117/12.903173 ◽

2011 ◽

Author(s):

Tadatsugu Minami ◽

Toshihiro Miyata ◽

Tomoyasu Hirano ◽

Jun-ichi Nomoto

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Zno Thin Films ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Effect of target properties on transparent conducting impurity-doped ZnO thin films deposited by DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.08.007 ◽

2010 ◽

Vol 519 (1) ◽

pp. 385-390 ◽

Cited By ~ 38

Author(s):

Tadatsugu Minami ◽

Jun-ichi Oda ◽

Jun-ichi Nomoto ◽

Toshihiro Miyata

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Spatial resistivity distribution of transparent conducting impurity-doped ZnO thin films deposited on substrates by dc magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3357284 ◽

2010 ◽

Vol 28 (4) ◽

pp. 842-845 ◽

Cited By ~ 6

Author(s):

Tadatsugu Minami ◽

Jun-ichi Oda ◽

Jun-ichi Nomoto ◽

Toshihiro Miyata

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Characterization of Transparent Conducting Al-Doped ZnO Thin Films and Device Applications

Journal of the Korean Physical Society ◽

10.3938/jkps.51.79 ◽

2007 ◽

Vol 51 (12) ◽

pp. 79 ◽

Cited By ~ 5

Author(s):

Sang Hern LEE ◽

Young Moon YU ◽

Tae Hoon KIM ◽

Se-Young JEONG

Keyword(s):

Thin Films ◽

Zno Thin Films ◽

Transparent Conducting ◽

Device Applications ◽

Doped Zno

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The effect of dopant concentration on properties of transparent conducting Al-doped ZnO thin films for efficient Cu2ZnSnS4 thin-film solar cells prepared by electrodeposition method

Applied Nanoscience ◽

10.1007/s13204-015-0400-3 ◽

2015 ◽

Vol 5 (8) ◽

pp. 993-1001 ◽

Cited By ~ 33

Author(s):

E. M. Mkawi ◽

K. Ibrahim ◽

M. K. M. Ali ◽

M. A. Farrukh ◽

A. S. Mohamed

Keyword(s):

Thin Film ◽

Thin Films ◽

Solar Cells ◽

Dopant Concentration ◽

Thin Film Solar Cells ◽

Zno Thin Films ◽

Electrodeposition Method ◽

Transparent Conducting ◽

Doped Zno ◽

Cu2znsns4 Thin Film

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Growth of transparent conducting nanocrystalline Al doped ZnO thin films by pulsed laser deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2006.06.035 ◽

2006 ◽

Vol 294 (2) ◽

pp. 427-431 ◽

Cited By ~ 123

Author(s):

R.K. Shukla ◽

Anchal Srivastava ◽

Atul Srivastava ◽

K.C. Dubey

Keyword(s):

Thin Films ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Zno Thin Films ◽

Transparent Conducting ◽

Doped Zno

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Improvements of spatial resistivity distribution in transparent conducting Al-doped ZnO thin films deposited by DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2009.09.174 ◽

2010 ◽

Vol 518 (11) ◽

pp. 2984-2987 ◽

Cited By ~ 36

Author(s):

Jun-ichi Oda ◽

Jun-ichi Nomoto ◽

Toshihiro Miyata ◽

Tadatsugu Minami

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Doped Zno

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Growth of transparent conducting nano-structured In doped ZnO thin films by pulsed DC magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2007.09.008 ◽

2008 ◽

Vol 254 (8) ◽

pp. 2250-2254 ◽

Cited By ~ 30

Author(s):

Young Ran Park ◽

Eung Kwon Kim ◽

Donggeun Jung ◽

Tae Seok Park ◽

Young Sung Kim

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Pulsed Dc ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

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