Velocity distribution function of sputtered gallium atoms during inductively coupled argon plasma treatment of a GaAs surface

2009 ◽  
Vol 27 (2) ◽  
pp. 356-361 ◽  
Author(s):  
Emilie Despiau-Pujo ◽  
Pascal Chabert ◽  
Raphaël Ramos ◽  
Gilles Cunge ◽  
Nader Sadeghi
2021 ◽  
Author(s):  
Tatsuhiro Tokai ◽  
Yuji Shimabukuro ◽  
Hidenori Takahashi ◽  
Keita Bito ◽  
Motoi Wada

2020 ◽  
Vol 5 (10) ◽  
Author(s):  
Sergiu Busuioc ◽  
Livio Gibelli ◽  
Duncan A. Lockerby ◽  
James E. Sprittles

1988 ◽  
Vol 40 (3) ◽  
pp. 407-417 ◽  
Author(s):  
Cheng Chu ◽  
J. L. Sperling

Electromagnetic fluctuations, induced by energetic charged particles, are calculated using correlation techniques for a uniform magnetized plasma. Power emission in the ion-cyclotron range of frequencies (ICRF) is calculated for a specific model of velocity distribution function. The emissive spectra are distinct from that of the black-body radiation and have features that are consistent with experimental observation.


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