Velocity distribution function of sputtered gallium atoms during inductively coupled argon plasma treatment of a GaAs surface
2009 ◽
Vol 27
(2)
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pp. 356-361
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1988 ◽
Vol 40
(3)
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pp. 407-417
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Keyword(s):
1972 ◽
Vol 5
(8)
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pp. 1188-1195
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2019 ◽
Vol 197
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pp. 69-73
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