The effect of thin metal overlayers on the electron beam exposure of polymethyl methacrylate
2008 ◽
Vol 26
(6)
◽
pp. 2300-2305
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1980 ◽
Vol 5
(4)
◽
pp. 388-397
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2017 ◽
Vol 35
(4)
◽
pp. 041602
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2008 ◽
Vol 15
(4)
◽
pp. 965-973
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1991 ◽
Vol 43
(13)
◽
pp. 10677-10689
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2004 ◽
Vol 22
(6)
◽
pp. 2907
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2017 ◽
Vol 45
(1)
◽
pp. 76-84
◽
1992 ◽
Vol 54
(6)
◽
pp. 520-522
◽
2004 ◽
Vol 22
(6)
◽
pp. 2936
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