Spatial-frequency multiplication with multilevel interference lithography

2008 ◽  
Vol 26 (6) ◽  
pp. 2135-2138 ◽  
Author(s):  
Chih-Hao Chang ◽  
Y. Zhao ◽  
R. K. Heilmann ◽  
M. L. Schattenburg
Keyword(s):  
Spatial Frequency ◽  
Interference Lithography ◽  
Frequency Multiplication

Spatial-frequency multiplication via absorbance modulation

2007 ◽  
Vol 91 (9) ◽  
pp. 094103 ◽  
Author(s):  
Hsin-Yu Tsai ◽  
Gregory M. Wallraff ◽  
Rajesh Menon
Keyword(s):  
Spatial Frequency ◽  
Frequency Multiplication

scholarly journals Ultrahigh spatial-frequency, high-contrast periodic structures produced by interference lithography

1996 ◽  
Author(s):  
H. T. Nguyen ◽  
J. A. Britten ◽  
R. D. Boyd ◽  
B. D. Shore ◽  
M. D. Perry
Keyword(s):  
Spatial Frequency ◽  
Periodic Structures ◽  
Interference Lithography ◽  
High Contrast

Spatial frequency multiplication techniques towards half-pitch 10nm patterning

2011 ◽  
Author(s):  
Yijian Chen ◽  
Yongmei Chen ◽  
Liyan Miao ◽  
Ping Xu ◽  
Xumou Xu ◽  
...  
Keyword(s):  
Spatial Frequency ◽  
Frequency Multiplication

High-resolution Fresnel zone plate fabrication by achromatic spatial frequency multiplication with extreme ultraviolet radiation

2011 ◽  
Vol 36 (10) ◽  
pp. 1860 ◽  
Author(s):  
Sankha Subhra Sarkar ◽  
Harun H. Solak ◽  
Menouer Saidani ◽  
Christian David ◽  
J. Friso van der Veen
Keyword(s):  
High Resolution ◽  
Spatial Frequency ◽  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Fresnel Zone ◽  
Zone Plate ◽  
Fresnel Zone Plate ◽  
Frequency Multiplication ◽  
Extreme Ultraviolet Radiation
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