Phase control in multiexposure spatial frequency multiplication

2007 ◽  
Vol 25 (6) ◽  
pp. 2439 ◽  
Author(s):  
Yong Zhao ◽  
Chih-Hao Chang ◽  
Ralf K. Heilmann ◽  
Mark L. Schattenburg
Keyword(s):  
Spatial Frequency ◽  
Phase Control ◽  
Frequency Multiplication

Spatial-frequency multiplication via absorbance modulation

2007 ◽  
Vol 91 (9) ◽  
pp. 094103 ◽  
Author(s):  
Hsin-Yu Tsai ◽  
Gregory M. Wallraff ◽  
Rajesh Menon
Keyword(s):  
Spatial Frequency ◽  
Frequency Multiplication

Spatial frequency multiplication techniques towards half-pitch 10nm patterning

2011 ◽  
Author(s):  
Yijian Chen ◽  
Yongmei Chen ◽  
Liyan Miao ◽  
Ping Xu ◽  
Xumou Xu ◽  
...  
Keyword(s):  
Spatial Frequency ◽  
Frequency Multiplication

High-resolution Fresnel zone plate fabrication by achromatic spatial frequency multiplication with extreme ultraviolet radiation

2011 ◽  
Vol 36 (10) ◽  
pp. 1860 ◽  
Author(s):  
Sankha Subhra Sarkar ◽  
Harun H. Solak ◽  
Menouer Saidani ◽  
Christian David ◽  
J. Friso van der Veen
Keyword(s):  
High Resolution ◽  
Spatial Frequency ◽  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Fresnel Zone ◽  
Zone Plate ◽  
Fresnel Zone Plate ◽  
Frequency Multiplication ◽  
Extreme Ultraviolet Radiation

Method of Adjusting the Groove Density Spatial Frequency Multiplication of Plane Holographic Grating

2011 ◽  
Vol 31 (10) ◽  
pp. 1005003
Author(s):  
韩建 Han Jian ◽  
巴音贺希格 Bayanheshig ◽  
李文昊 Li Wenhao ◽  
孔鹏 Kong Peng
Keyword(s):  
Spatial Frequency ◽  
Holographic Grating ◽  
Frequency Multiplication
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