Silane injection in a high-density low-pressure plasma system and its influence on the deposition kinetics and material properties of SiO2
2008 ◽
Vol 26
(5)
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pp. 1115-1119
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Keyword(s):
2015 ◽
Vol 24
(3)
◽
pp. 034005
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Keyword(s):
Keyword(s):
2009 ◽
Vol 24
(1)
◽
pp. 117-121
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Keyword(s):
Keyword(s):